{"id":"W2091963221","doi":"10.1117/12.977189","title":"Bimetallic grayscale photomasks for micro-optics fabrication usingdual wavelength laser writing techniques","year":2012,"lang":"en","type":"article","venue":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","topic":"Laser Material Processing Techniques","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Simon Fraser University","funders":"","keywords":"Optics; Materials science; Grayscale; Laser; Photomask; Optoelectronics; Maskless lithography; Computer science; Resist; Electron-beam lithography; Pixel; Physics; Nanotechnology","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0008241534,0.0004509935,0.0005023328,0.0001648057,0.0001216757,0.0001874826,0.0008525084,0.000325946,0.000007255695],"category_scores_gemma":[0.0004833992,0.0004117029,0.0005364635,0.000345728,0.0001928579,0.001037566,0.0001545458,0.000302827,0.000001423017],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000274343,"about_ca_system_score_gemma":0.00002816067,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00000542481,"about_ca_topic_score_gemma":8.252193e-8,"domain_scores_codex":[0.9975765,2.535289e-8,0.0008923686,0.0003424205,0.0005119594,0.0006766829],"domain_scores_gemma":[0.9977276,0.0001808403,0.0003389691,0.0000904558,0.001505068,0.0001570661],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004640877,0.0001215647,0.0002302422,0.001498538,0.000300591,2.752579e-8,0.0002110712,0.00003422374,0.9287196,0.06395523,0.003895865,0.0009865864],"study_design_scores_gemma":[0.0004421074,0.0001433251,0.0001959226,0.0003583974,0.0001868021,0.00001377903,0.0003303498,0.02287962,0.9690953,0.001376828,0.004502761,0.0004747609],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9953209,0.0001279916,0.0007695293,0.0003588699,0.0003795046,0.0009641979,0.000107727,0.0007716894,0.001199578],"genre_scores_gemma":[0.5813918,0.0001071097,0.4169024,0.00005981061,0.0008914566,0.0004234297,0.00002583302,0.0001425006,0.00005570501],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.4161329,"threshold_uncertainty_score":0.9998335,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01433550586844461,"score_gpt":0.2379817652390118,"score_spread":0.2236462593705671,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}