{"id":"W2092298237","doi":"10.1063/1.2740582","title":"Poly(ether sulfone) as a negative resist for electron beam lithography","year":2007,"lang":"en","type":"article","venue":"Applied Physics Letters","topic":"Advancements in Photolithography Techniques","field":"Engineering","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"Applied Nanotools (Canada); National Institute for Nanotechnology; University of Alberta","funders":"","keywords":"Sulfone; Resist; Materials science; Polymer; Ether; Polymer chemistry; Irradiation; Electron beam processing; Electron-beam lithography; Methyl methacrylate; Methacrylate; Copolymer; Chemistry; Nanotechnology; Organic chemistry; Composite material","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002105082,0.000427294,0.000173567,0.0003060192,0.0001292003,0.0002715445,0.0002314846,0.0001990423,0.002044748],"category_scores_gemma":[0.0001624781,0.0001747903,0.0001121501,0.0002617422,0.000233205,0.0003006384,0.0002169084,0.0003015993,0.0009366124],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001402828,"about_ca_system_score_gemma":0.0001707671,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001902284,"about_ca_topic_score_gemma":0.0006256391,"domain_scores_codex":[0.9998217,0.00002454387,0.00001314046,0.0000285212,0.00009309528,0.00001905033],"domain_scores_gemma":[0.9998964,0.00003430005,0.00002155131,0.00001955857,0.00001722105,0.00001095806],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002468403,0.000006097997,0.00008176112,0.00004372444,0.000001321344,0.00007066691,0.000007183889,0.00007530428,0.9943305,0.0003884996,0.0001259966,0.004844329],"study_design_scores_gemma":[0.000007050737,0.0001007287,0.0006996276,0.000005189446,0.000006192678,0.0004847801,0.000006204927,0.0008177182,0.9882109,0.0001041436,0.009552489,0.000004908342],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7503991,0.01080483,0.2013911,0.00040558,0.0004744416,0.0002809067,0.0006995252,0.001226046,0.03431841],"genre_scores_gemma":[0.8845425,0.004552923,0.08556218,0.0001330534,0.00005379637,0.00008713753,0.0005887713,0.0001308504,0.02434891],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002044748,"threshold_uncertainty_score":0.006840348,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006614511021230753,"score_gpt":0.2414228397358052,"score_spread":0.2348083287145744,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}