{"id":"W2092304342","doi":"10.1117/12.567675","title":"Simulation of femtosecond laser ablation of silicon","year":2004,"lang":"en","type":"article","venue":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","topic":"Laser Material Processing Techniques","field":"Engineering","cited_by":11,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta","funders":"Natural Sciences and Engineering Research Council of Canada; Western Canada Research Grid","keywords":"Materials science; Femtosecond; Silicon; Laser; Laser ablation; Microelectronics; Ablation; Surface micromachining; Crystalline silicon; Optoelectronics; Optics; Fabrication; Physics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002492572,0.0004234141,0.0006682446,0.0004228947,0.000669274,0.0006937899,0.000853647,0.001466088,0.004378055],"category_scores_gemma":[0.001512737,0.0004169515,0.0006074274,0.0005852562,0.0006320429,0.0005084421,0.0004605765,0.0006650904,0.0002425925],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.001274192,"about_ca_system_score_gemma":0.00185441,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.01981098,"about_ca_topic_score_gemma":0.01026698,"domain_scores_codex":[0.9998486,0.00003048505,0.000005973383,0.00002046041,0.00004654101,0.00004795211],"domain_scores_gemma":[0.9992943,0.0004287649,0.00004891703,0.00003371269,0.0001059481,0.00008834463],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"simulation_or_modeling","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.00007363044,0.00005039418,0.001231894,0.00003550069,0.00002169877,0.0001080415,0.0000400402,0.9938098,0.001481936,0.001745585,0.000386062,0.001015432],"study_design_scores_gemma":[0.00002746687,0.00002070729,0.0003673287,0.000004470637,0.000004045271,0.00001205356,0.00001712463,0.9981908,0.0006918868,0.000333451,0.0003265533,0.000004133335],"study_design_candidate":"simulation_or_modeling","study_design_consensus":"simulation_or_modeling","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.964714,0.000234276,0.01558665,0.0003900602,0.00005746797,0.00008849234,0.001282368,0.0004657212,0.01718099],"genre_scores_gemma":[0.9857013,0.0001256624,0.01011348,0.00007251392,0.000007098855,0.0001459783,0.0009868129,0.00007976675,0.002767402],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.01981098,"threshold_uncertainty_score":0.03939134,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01080268343104475,"score_gpt":0.2309438756457459,"score_spread":0.2201411922147012,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}