{"id":"W2092787859","doi":"10.1116/1.582172","title":"Fabrication of high performance GaN modulation doped field effect transistors","year":2000,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","topic":"GaN-based semiconductor devices and materials","field":"Physics and Astronomy","cited_by":26,"is_retracted":false,"has_abstract":true,"ca_institutions":"Nortel (Canada); Institute for Microstructural Sciences","funders":"","keywords":"Materials science; Optoelectronics; Etching (microfabrication); Wafer; Fabrication; Reactive-ion etching; Transconductance; Dry etching; Layer (electronics); Transistor; Nanotechnology","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002284176,0.0002827831,0.0002932249,0.0001614142,0.0002456255,0.0003587619,0.0004819019,0.0003900156,0.001818091],"category_scores_gemma":[0.0002322136,0.0002773913,0.0001915673,0.0002063205,0.0001442123,0.0002863597,0.0002133348,0.0004797824,0.000890788],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002857279,"about_ca_system_score_gemma":0.0001713636,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004153195,"about_ca_topic_score_gemma":0.001097275,"domain_scores_codex":[0.9998306,0.00001158051,0.00001147752,0.00002999746,0.00008183368,0.00003445469],"domain_scores_gemma":[0.9999187,0.00001849275,0.00001152133,0.00001700055,0.0000185846,0.00001563177],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001564338,0.00001905063,0.00007839741,0.00005610478,0.000005190876,0.00005642641,0.00002615664,0.0002110792,0.9946998,0.0004518431,0.0003077969,0.004072561],"study_design_scores_gemma":[0.00002907978,0.0001973322,0.001670992,0.000007630289,0.000009211481,0.0001777156,0.00001691105,0.002145522,0.983237,0.0002770456,0.01221904,0.00001255527],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8460241,0.002873804,0.1138268,0.000589936,0.00063025,0.0008463795,0.003001881,0.001404402,0.03080247],"genre_scores_gemma":[0.875013,0.002045769,0.1101973,0.0001551238,0.00009442467,0.0004537682,0.001077252,0.0001354638,0.01082798],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001818091,"threshold_uncertainty_score":0.006082118,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005866001939344085,"score_gpt":0.2276224468320092,"score_spread":0.2217564448926651,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}