{"id":"W2092939198","doi":"10.1088/0960-1317/17/8/013","title":"Nd-YAG laser microvia drilling for interconnection application","year":2007,"lang":"en","type":"article","venue":"Journal of Micromechanics and Microengineering","topic":"Laser Material Processing Techniques","field":"Engineering","cited_by":26,"is_retracted":false,"has_abstract":true,"ca_institutions":"Toronto Metropolitan University","funders":"","keywords":"Materials science; Microelectronics; Interconnection; Laser drilling; Laser; Optoelectronics; Diode; Drilling; Wavelength; Laser ablation; Machining; Optics; Metallurgy; Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0005489318,0.0001528759,0.0002122994,0.0002302529,0.00004504245,0.00004574226,0.0001210452,0.00009938536,0.000001871754],"category_scores_gemma":[0.0000193086,0.0001543159,0.00006947109,0.00009679988,0.000007847253,0.000186011,0.00002204467,0.0001524073,8.685701e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00009438424,"about_ca_system_score_gemma":0.000008145437,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000001919879,"about_ca_topic_score_gemma":0.000002885,"domain_scores_codex":[0.9991752,0.000003106903,0.000432596,0.0001024144,0.00005990102,0.0002267829],"domain_scores_gemma":[0.9995661,0.00003907389,0.0001145328,0.00008815938,0.0001188175,0.0000732928],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000230783,0.000008393971,0.000004294557,0.0002026419,0.00002953285,0.000002611007,0.00009396721,0.0008144523,0.9885667,0.00009924225,0.0002229111,0.009932153],"study_design_scores_gemma":[0.0003448357,0.0000782422,0.00001297567,0.0001564863,0.00003172037,0.0002236438,0.00005033937,0.0149554,0.9726073,0.0007543196,0.01061083,0.0001739444],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.4046839,0.0006112323,0.5940778,0.00001518764,0.000418351,0.00009016936,0.000004074443,0.00009128589,0.000008012373],"genre_scores_gemma":[0.9535555,0.0002204036,0.04587806,0.00002397867,0.000250821,0.000003855727,0.000003438769,0.00005434799,0.000009640725],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.5488715,"threshold_uncertainty_score":0.6292821,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.003883964089531493,"score_gpt":0.2009709873409576,"score_spread":0.1970870232514261,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}