{"id":"W2092941047","doi":"10.1063/1.2084329","title":"<i>Ex situ</i> ellipsometric investigation of nanocolumns inclination angle of obliquely evaporated silicon thin films","year":2005,"lang":"en","type":"article","venue":"Applied Physics Letters","topic":"Optical Coatings and Gratings","field":"Materials Science","cited_by":46,"is_retracted":false,"has_abstract":true,"ca_institutions":"Queen's University","funders":"","keywords":"Materials science; Silicon; Thin film; Amorphous silicon; Characterization (materials science); Ellipsometry; Fabrication; Nanostructure; Optics; Void (composites); Amorphous solid; Silicon oxide; In situ; Nanocrystalline silicon; Crystalline silicon; Optoelectronics; Nanotechnology; Composite material; Crystallography; Chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00007014582,0.0001502631,0.0001258692,0.0001741827,0.0001633678,0.00029815,0.0001985504,0.0001354785,0.000703505],"category_scores_gemma":[0.0001483678,0.0001318639,0.00007929229,0.0001274749,0.0002293243,0.0002036055,0.0001526466,0.0002961536,0.0001150169],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001717089,"about_ca_system_score_gemma":0.0001030544,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0006495821,"about_ca_topic_score_gemma":0.0009956368,"domain_scores_codex":[0.9999359,0.000004629978,0.000003467049,0.0000128593,0.00003098888,0.00001214693],"domain_scores_gemma":[0.999892,0.00002035146,0.00003678873,0.00001709002,0.00002703293,0.000006700237],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001665991,0.000006243082,0.0005509911,0.00001631138,0.000001607004,0.00002974176,0.00002756335,0.0001112934,0.9978318,0.0002321117,0.00003935253,0.001136273],"study_design_scores_gemma":[0.000001956214,0.00001535389,0.004518743,0.000001731963,0.000002777666,0.0000815885,0.00003866628,0.00162565,0.9930103,0.00006000409,0.0006394679,0.000003686431],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9840306,0.0003954051,0.01179788,0.0000694892,0.00001714252,0.00001255134,0.0001715329,0.00006917374,0.003436225],"genre_scores_gemma":[0.9893754,0.000321499,0.00931727,0.00001918851,0.000008772708,0.00001022127,0.0000876501,0.00001434705,0.0008457733],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.000703505,"threshold_uncertainty_score":0.002353489,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01443810826342812,"score_gpt":0.2285208599793134,"score_spread":0.2140827517158853,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}