{"id":"W2093235814","doi":"10.1016/s0169-4332(02)01322-3","title":"Cu cluster adhesion enhancement on the modified Dow Cyclotene surface through low energy N2+ beam irradiation at grazing angles","year":2003,"lang":"en","type":"article","venue":"Applied Surface Science","topic":"Copper Interconnects and Reliability","field":"Materials Science","cited_by":8,"is_retracted":false,"has_abstract":false,"ca_institutions":"Polytechnique Montréal","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"X-ray photoelectron spectroscopy; Materials science; Irradiation; Beam (structure); Cluster (spacecraft); Evaporation; Coalescence (physics); Contact angle; Polymer; Analytical Chemistry (journal); Beam energy; Surface energy; Adhesion; Atomic physics; Optics; Composite material; Chemistry; Physics; Nuclear magnetic resonance; Nuclear physics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001031475,0.0002176519,0.0002133903,0.0001430956,0.0002571371,0.0002717786,0.0002942838,0.0002365256,0.001988782],"category_scores_gemma":[0.0001205018,0.000220559,0.0001565614,0.0001625377,0.000176205,0.0001620095,0.0002238733,0.0002269096,0.0003282827],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002673148,"about_ca_system_score_gemma":0.0001335982,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.002004136,"about_ca_topic_score_gemma":0.003957262,"domain_scores_codex":[0.9998755,0.000008234132,0.000003936924,0.00002675697,0.00003573771,0.00004980928],"domain_scores_gemma":[0.9999387,0.00001236332,0.00001478156,0.00001163085,0.00001450172,0.000008005488],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001150498,0.000007339247,0.0001628837,0.0000341002,0.000003391668,0.00004650702,0.00005057777,0.00007368376,0.9981782,0.00006707102,0.0001247566,0.001136382],"study_design_scores_gemma":[0.000006016613,0.00007657162,0.002501832,0.000002115963,0.000005741,0.00005745527,0.00003646604,0.0003665719,0.9957819,0.00001043749,0.001151216,0.000003694823],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9965281,0.0002663713,0.0005571613,0.00002881903,0.00001782076,0.000005975251,0.00004629064,0.00003009037,0.002519407],"genre_scores_gemma":[0.9959473,0.0002117312,0.0006094461,0.00001534921,0.00000564546,0.000006978922,0.0000801631,0.00001619103,0.003107178],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002004136,"threshold_uncertainty_score":0.00665307,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01793089453817303,"score_gpt":0.2426618815341946,"score_spread":0.2247309869960216,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}