{"id":"W2093235814","doi":"10.1016/s0169-4332(02)01322-3","title":"Cu cluster adhesion enhancement on the modified Dow Cyclotene surface through low energy N2+ beam irradiation at grazing angles","year":2003,"lang":"en","type":"article","venue":"Applied Surface Science","topic":"Copper Interconnects and Reliability","field":"Materials Science","cited_by":8,"is_retracted":false,"has_abstract":false,"ca_institutions":"Polytechnique Montréal","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"X-ray photoelectron spectroscopy; Materials science; Irradiation; Beam (structure); Cluster (spacecraft); Evaporation; Coalescence (physics); Contact angle; Polymer; Analytical Chemistry (journal); Beam energy; Surface energy; Adhesion; Atomic physics; Optics; Composite material; Chemistry; Physics; Nuclear magnetic resonance; Nuclear physics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["sts"],"consensus_categories":[],"category_scores_codex":[0.002578679,0.0003345001,0.0002902096,0.00003962465,0.001304989,0.000279943,0.000844987,0.0001095674,0.0003436728],"category_scores_gemma":[0.0001822244,0.0002156427,0.0000834028,0.0007036268,0.0008296444,0.0003680099,0.0002840782,0.0001615014,0.000335636],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000461081,"about_ca_system_score_gemma":0.0001667065,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003325274,"about_ca_topic_score_gemma":0.0001187422,"domain_scores_codex":[0.9963917,0.00015713,0.0004585136,0.001111681,0.001071486,0.0008095109],"domain_scores_gemma":[0.9980485,0.0004454922,0.0002255131,0.00098825,0.0001437828,0.0001483942],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00005550752,0.0001107905,0.00005574221,0.0000117194,0.000003057048,8.074228e-7,0.0006239436,0.03177819,0.9459924,0.02056633,0.000574933,0.0002266004],"study_design_scores_gemma":[0.0003195028,0.00009045214,0.0004623248,0.00003704225,0.000008958877,0.000002369112,0.000324272,0.002857139,0.9913648,0.002466453,0.001737999,0.000328699],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9814474,0.0001272949,0.002668723,0.0008462692,0.0009345104,0.0004987073,0.000009279011,0.00009660217,0.01337124],"genre_scores_gemma":[0.9964623,0.00007460016,0.001558061,0.001197989,0.0000350937,0.00002863578,0.000003712513,0.00002221754,0.0006173518],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.04537241,"threshold_uncertainty_score":0.9999952,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01793089453817303,"score_gpt":0.2426618815341946,"score_spread":0.2247309869960216,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}