{"id":"W2093335350","doi":"10.1063/1.4733336","title":"High-quality surface passivation of silicon using native oxide and silicon nitride layers","year":2012,"lang":"en","type":"article","venue":"Applied Physics Letters","topic":"Silicon and Solar Cell Technologies","field":"Engineering","cited_by":40,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Toronto","funders":"","keywords":"Passivation; Materials science; Silicon nitride; Oxide; Silicon oxide; Silicon; Carrier lifetime; Layer (electronics); Deposition (geology); Chemical vapor deposition; Optoelectronics; Nitride; Remote plasma; Analytical Chemistry (journal); Chemical engineering; Nanotechnology; Chemistry; Metallurgy","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000198168,0.0003475916,0.0002012819,0.0001440262,0.0001155929,0.0003349083,0.0002318062,0.0001843393,0.0003251233],"category_scores_gemma":[0.0001916744,0.0001437351,0.0002065368,0.0001070076,0.0002731393,0.0001840941,0.0002631194,0.0002458078,0.0001432425],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001362103,"about_ca_system_score_gemma":0.0001733483,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004459874,"about_ca_topic_score_gemma":0.001084092,"domain_scores_codex":[0.9998896,0.000009345998,0.000006632501,0.00002004069,0.00005063884,0.00002362742],"domain_scores_gemma":[0.9998732,0.00002505083,0.00004283201,0.00002103569,0.00002656266,0.00001136437],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001077734,0.000007146521,0.0004113745,0.00004592618,0.000006315606,0.00005549903,0.00002697331,0.0001289803,0.9969773,0.0001601939,0.00002425975,0.002145294],"study_design_scores_gemma":[0.000003638286,0.0001673756,0.001865081,0.000002741675,0.000007767245,0.0001861172,0.00001915295,0.0008333038,0.9956982,0.00005315466,0.001159954,0.000003491755],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.986827,0.001603238,0.009907407,0.00004300541,0.00002000784,0.00002421709,0.00008011575,0.00006819298,0.001426715],"genre_scores_gemma":[0.9902811,0.001074554,0.00756377,0.0000184545,0.000009029737,0.00001063525,0.0001462304,0.00001410809,0.0008822406],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0004459874,"threshold_uncertainty_score":0.001087606,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02312112829444044,"score_gpt":0.239286125281936,"score_spread":0.2161649969874956,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}