{"id":"W2094097574","doi":"10.1116/1.3503612","title":"Controlled sacrificial sidewall surface micromachining for the release of high length-to-thickness aspect ratio bridges","year":2010,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Carleton University","funders":"","keywords":"Surface micromachining; Photoresist; Materials science; Layer (electronics); Ashing; Composite material; Etching (microfabrication); Aspect ratio (aeronautics); Nanotechnology; Fabrication","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001866129,0.0002520343,0.0002126005,0.0001223397,0.0001204079,0.0002139575,0.0003460792,0.0002163606,0.0005111612],"category_scores_gemma":[0.0001813548,0.000218944,0.0002096927,0.00007541566,0.0001782275,0.0002319503,0.0002567632,0.0004329044,0.0002204552],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001247923,"about_ca_system_score_gemma":0.0001118899,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00009553573,"about_ca_topic_score_gemma":0.0003646034,"domain_scores_codex":[0.999878,0.00001072942,0.000008255241,0.00002578239,0.00005714065,0.00002011927],"domain_scores_gemma":[0.9998472,0.00003063819,0.00005738792,0.00002864839,0.00001801532,0.00001821562],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000005169552,0.000002604995,0.00001823426,0.00001317919,0.000001105782,0.0000168428,0.00001107608,0.00004212256,0.9988413,0.0000602038,0.0000141848,0.0009740393],"study_design_scores_gemma":[0.000008789188,0.0001259726,0.0007146806,0.000001635709,0.000003823633,0.0001380377,0.000008939985,0.001236726,0.9964231,0.00003436728,0.00129946,0.000004511791],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9372007,0.001499809,0.0586888,0.00008755962,0.00006642236,0.00005973697,0.0001199435,0.0004026302,0.00187423],"genre_scores_gemma":[0.9617785,0.0005132181,0.03602083,0.00003115834,0.00001810778,0.000047455,0.00009984444,0.00007458638,0.001416282],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0005111612,"threshold_uncertainty_score":0.001710057,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009377149295877909,"score_gpt":0.2283017736266709,"score_spread":0.218924624330793,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}