{"id":"W2095309740","doi":"10.1117/12.628601","title":"Thermo-electrical influence on static and dynamic behaviour of cantilever type silicon waveguide","year":2005,"lang":"en","type":"article","venue":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":4,"is_retracted":false,"has_abstract":true,"ca_institutions":"Concordia University","funders":"","keywords":"Cantilever; Materials science; Microelectromechanical systems; Capacitive sensing; Stiffness; Thermal; Waveguide; Microsystem; Voltage; Electrostatics; Electric field; Acoustics; Optoelectronics; Mechanics; Electrical engineering; Composite material; Physics; Engineering; Nanotechnology","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001849042,0.0002536934,0.0003402202,0.0001041674,0.00003593304,0.00002843842,0.0004416583,0.0001711445,0.000006163727],"category_scores_gemma":[0.0003250001,0.0002114636,0.0001878222,0.0002418121,0.0001875965,0.0002752171,0.00007899297,0.0003080153,9.730536e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001395728,"about_ca_system_score_gemma":0.00001501795,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000006140389,"about_ca_topic_score_gemma":4.301414e-7,"domain_scores_codex":[0.9985991,4.950315e-9,0.0004923,0.000238998,0.0003636269,0.0003059618],"domain_scores_gemma":[0.9990268,0.0001044641,0.0001594326,0.00005506805,0.0005861307,0.00006812027],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004512348,0.00005856289,0.0001957811,0.0002645328,0.0001588691,8.69516e-8,0.0001113544,0.001713755,0.9404895,0.05462092,0.0005027935,0.00183868],"study_design_scores_gemma":[0.001030379,0.0006561377,0.007963567,0.0004598672,0.0001461304,0.00001804948,0.0005588571,0.1091258,0.8761328,0.001615054,0.001770286,0.0005230421],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9980842,0.0001928335,0.00001267936,0.0004338251,0.00007648271,0.0002960823,0.00002287856,0.0001488906,0.0007320949],"genre_scores_gemma":[0.967418,0.0004174862,0.03188405,0.00003860182,0.00005727647,0.00003877505,0.000002227466,0.00004946838,0.00009417157],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.107412,"threshold_uncertainty_score":0.8623234,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007416576464370671,"score_gpt":0.2294211178329985,"score_spread":0.2220045413686278,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}