{"id":"W2095331098","doi":"10.1116/1.582162","title":"Laser infrared photothermal radiometry of electronic solids: Principles and applications to industrial semiconductor Si wafers","year":2000,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","topic":"Thermography and Photoacoustic Techniques","field":"Engineering","cited_by":16,"is_retracted":false,"has_abstract":true,"ca_institutions":"Mitel (Canada); University of Toronto","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Wafer; Semiconductor; Laser; Radiometry; Metrology; Optoelectronics; Materials science; Photothermal therapy; Optics; Infrared; Surface photovoltage; Semiconductor laser theory; Carrier lifetime; Silicon; Nanotechnology; Physics; Spectroscopy","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004963814,0.0003072002,0.0002404828,0.000540258,0.0001698345,0.000530549,0.0007035359,0.0005103438,0.001062556],"category_scores_gemma":[0.0006908614,0.0002536222,0.0001868141,0.0004847229,0.0006745948,0.0005434904,0.0003094159,0.0006627246,0.0004431103],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003057323,"about_ca_system_score_gemma":0.0001664057,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001609285,"about_ca_topic_score_gemma":0.0001973202,"domain_scores_codex":[0.9996952,0.00005885968,0.00001018678,0.00006282076,0.0001499869,0.00002302671],"domain_scores_gemma":[0.9995773,0.0002074139,0.00006670313,0.00007195455,0.00006356256,0.0000130185],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00005319432,0.00004205823,0.001224647,0.0002728575,0.00001016212,0.0001750408,0.0001398168,0.00383541,0.8979322,0.0065641,0.0005088931,0.08924163],"study_design_scores_gemma":[0.00001368901,0.0004597694,0.003700241,0.00004238796,0.00002038457,0.002248976,0.0001142192,0.03543626,0.9379945,0.003853277,0.0160777,0.00003861824],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.2001641,0.01261268,0.771854,0.0007048271,0.00007705601,0.0001491253,0.0001321076,0.001970655,0.01233546],"genre_scores_gemma":[0.730803,0.004724022,0.2595452,0.0001307821,0.00008001078,0.0001112961,0.00007656805,0.00009407169,0.00443515],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.001062556,"threshold_uncertainty_score":0.003554583,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01119041285277345,"score_gpt":0.2284990469094074,"score_spread":0.2173086340566339,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}