{"id":"W2096016646","doi":"10.1109/mikon.2004.1358483","title":"RF MEMS tunable inductor","year":2004,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":13,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Calgary","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Inductor; RFIC; Inductance; Radio frequency; Q factor; Microelectromechanical systems; Materials science; Electrical engineering; Wafer; Quality (philosophy); Optoelectronics; Surface micromachining; Engineering; Physics; Voltage; Medicine; Resonator","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00001267632,0.00006118033,0.00006046332,0.00003265397,0.0000187358,0.000007027635,0.00007022646,0.000054132,0.00006611316],"category_scores_gemma":[0.000008616401,0.00005087908,0.00001533237,0.00008841994,0.00001588661,0.00009516359,0.00001629284,0.00008018687,0.0001077922],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00003581071,"about_ca_system_score_gemma":0.000004063746,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00001709539,"about_ca_topic_score_gemma":0.00001626134,"domain_scores_codex":[0.9996993,6.63234e-8,0.00005698422,0.0000633744,0.00003951825,0.0001407762],"domain_scores_gemma":[0.9998367,0.000003662138,0.000003858113,0.0001285599,0.000006351947,0.00002084089],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[4.969547e-7,0.000005417373,0.000006677707,0.000009895992,0.000008230159,0.00000585791,0.0000286308,0.00893675,0.9751191,0.005588524,0.0009020666,0.009388406],"study_design_scores_gemma":[0.0001511367,0.00001279103,0.0001013046,0.000006080365,0.000001251081,0.00000337353,0.00008906123,0.00001019207,0.931883,0.01573912,0.0519019,0.0001008069],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9476289,0.000258773,0.006052713,0.0001557652,0.0002285054,0.00005688109,8.562021e-7,0.002315345,0.04330229],"genre_scores_gemma":[0.9917561,0.000115604,0.007169647,0.0000254579,0.00004592325,0.000008904799,6.818337e-7,0.00001510143,0.0008625904],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.05099984,"threshold_uncertainty_score":0.2074789,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009985485338059112,"score_gpt":0.2050820831087354,"score_spread":0.1950965977706763,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}