{"id":"W2096016646","doi":"10.1109/mikon.2004.1358483","title":"RF MEMS tunable inductor","year":2004,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":13,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Calgary","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Inductor; RFIC; Inductance; Radio frequency; Q factor; Microelectromechanical systems; Materials science; Electrical engineering; Wafer; Quality (philosophy); Optoelectronics; Surface micromachining; Engineering; Physics; Voltage; Medicine; Resonator","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001997903,0.0002747353,0.000312705,0.0002233448,0.0001939592,0.00046575,0.0008066584,0.0004746362,0.00296324],"category_scores_gemma":[0.0003177832,0.000169238,0.0002993536,0.0001566017,0.000196158,0.0005766856,0.0002820279,0.0003161586,0.001821907],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004795211,"about_ca_system_score_gemma":0.0001575068,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002063197,"about_ca_topic_score_gemma":0.0003718348,"domain_scores_codex":[0.999729,0.00002039084,0.00001611938,0.00008652938,0.0001086053,0.00003945534],"domain_scores_gemma":[0.99975,0.00005371097,0.00005508026,0.00003935343,0.00007991578,0.0000219358],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00007466825,0.00002134437,0.0002940728,0.0001425618,0.00001845469,0.0002209813,0.00003786071,0.000707864,0.9733425,0.001366435,0.001365738,0.02240758],"study_design_scores_gemma":[0.00006815594,0.0003763917,0.002259383,0.00002414116,0.00007282307,0.001572115,0.0000394658,0.00854827,0.9269465,0.0003979284,0.05965585,0.00003896243],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.5669148,0.01299374,0.2987604,0.001989411,0.001830191,0.0002401706,0.001240843,0.005634379,0.1103962],"genre_scores_gemma":[0.923057,0.001243007,0.05498043,0.0003124895,0.000322736,0.00005460513,0.0002787496,0.0001282303,0.01962279],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.00296324,"threshold_uncertainty_score":0.009913027,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009985485338059112,"score_gpt":0.2050820831087354,"score_spread":0.1950965977706763,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}