{"id":"W2096469016","doi":"10.1117/12.472807","title":"Bi/In as patterning and masking layers for alkaline-base Si anisotropic etching","year":2003,"lang":"en","type":"article","venue":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","topic":"Thin-Film Transistor Technologies","field":"Engineering","cited_by":11,"is_retracted":false,"has_abstract":true,"ca_institutions":"Simon Fraser University","funders":"","keywords":"Materials science; Photoresist; Silicon; Resist; Etching (microfabrication); Surface micromachining; Laser; Optoelectronics; Isotropic etching; Layer (electronics); Optics; Nanotechnology; Fabrication","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0005442967,0.0003716252,0.0004469399,0.0002004512,0.00007874006,0.0001093548,0.0005776583,0.0002571043,0.000006525674],"category_scores_gemma":[0.0007139473,0.0003548186,0.0003685265,0.0002938277,0.0001514294,0.0004808658,0.00006692846,0.0004220848,8.877677e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002145705,"about_ca_system_score_gemma":0.00002004631,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00001279992,"about_ca_topic_score_gemma":9.115307e-7,"domain_scores_codex":[0.9980785,2.116042e-8,0.0006418128,0.0003875142,0.0003878626,0.0005042886],"domain_scores_gemma":[0.9990702,0.0002002536,0.0001691291,0.0000639498,0.0004047748,0.00009174116],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003883872,0.00004637723,0.001224828,0.00108877,0.0002563152,3.330869e-7,0.0004476583,0.002746666,0.6609339,0.332285,0.0004628452,0.0004684115],"study_design_scores_gemma":[0.005204252,0.0006907753,0.001650038,0.001665002,0.0003489922,0.00008104159,0.008390903,0.2229517,0.732834,0.01178443,0.01275089,0.001648001],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9964284,0.000322961,0.0006025645,0.0006260966,0.0002719691,0.0005893006,0.0000315347,0.0003017947,0.0008254257],"genre_scores_gemma":[0.8795239,0.0001629038,0.1198333,0.00005877606,0.0001022419,0.0001812794,0.000004023945,0.00009537157,0.00003824781],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.3205006,"threshold_uncertainty_score":0.9998904,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01067148395138961,"score_gpt":0.2169454270958794,"score_spread":0.2062739431444898,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}