{"id":"W2096691511","doi":"10.1117/12.601545","title":"Creating precise 3D microstructures using laser direct-write bimetallic thermal resist grayscale photomasks","year":2005,"lang":"en","type":"article","venue":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","topic":"Advancements in Photolithography Techniques","field":"Engineering","cited_by":10,"is_retracted":false,"has_abstract":true,"ca_institutions":"Simon Fraser University","funders":"","keywords":"Photomask; Resist; Materials science; Photoresist; Lithography; Optics; Laser; Optoelectronics; Grayscale; Photolithography; Nanotechnology; Pixel","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0004109729,0.0005065636,0.0005411249,0.0001734923,0.0001630727,0.0001738623,0.0009805409,0.0002529654,0.00002875818],"category_scores_gemma":[0.0002362959,0.0004532781,0.0006825068,0.0004514018,0.0002806767,0.0008129604,0.0001791373,0.000422369,8.675335e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002786404,"about_ca_system_score_gemma":0.00002101074,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00001781205,"about_ca_topic_score_gemma":7.173217e-7,"domain_scores_codex":[0.9974121,2.854154e-8,0.0008754196,0.0004526803,0.0006670179,0.000592773],"domain_scores_gemma":[0.9985345,0.0001242673,0.0003106356,0.0001083464,0.0007806646,0.0001415604],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000707123,0.00008239309,0.0004355797,0.0005825048,0.0005458395,1.595677e-7,0.0002641375,0.003359928,0.9804167,0.01233469,0.001137308,0.0007700438],"study_design_scores_gemma":[0.0007195437,0.0001089139,0.000486417,0.000528085,0.0002066295,0.00001818458,0.0003337022,0.0705787,0.9198514,0.0004205231,0.006176717,0.0005711643],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9899111,0.0004261096,0.0001039647,0.0001004862,0.0002074282,0.0007017712,0.0001000764,0.0004518006,0.007997248],"genre_scores_gemma":[0.5707573,0.0001670564,0.4280832,0.00005146391,0.0004850769,0.0001708431,0.000008286332,0.0001424792,0.0001342953],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.4279792,"threshold_uncertainty_score":0.9997919,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009025869301347524,"score_gpt":0.2368429548438775,"score_spread":0.22781708554253,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}