{"id":"W2096981997","doi":"10.1109/newcas.2005.1496723","title":"Design and Analysis of Planar and Lattice-Electrostatic Comb Drive Actuators","year":2005,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":6,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Windsor","funders":"","keywords":"Comb drive; Actuator; Planar; Lattice (music); Capacitance; Electric field; Control theory (sociology); Materials science; Computer science; Physics; Engineering; Acoustics; Electrical engineering; Electrode","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001118015,0.0001180741,0.0001212364,0.0001353832,0.0001165226,0.0002299575,0.0001987629,0.0002247956,0.0006529755],"category_scores_gemma":[0.0002719793,0.0001100269,0.0001177763,0.00007885005,0.0001804695,0.000183262,0.0001577535,0.0001065575,0.0001732522],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001655696,"about_ca_system_score_gemma":0.0002093626,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002765059,"about_ca_topic_score_gemma":0.0003263938,"domain_scores_codex":[0.9999018,0.000006833002,0.000003318795,0.00001074226,0.00006838077,0.000008839163],"domain_scores_gemma":[0.99993,0.00002254528,0.00001897047,0.000006235785,0.00001707518,0.000005142808],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001317788,0.00003454067,0.001732067,0.0002194112,0.00002803226,0.000329798,0.00006044653,0.2336282,0.6907572,0.01979582,0.0003675028,0.05291535],"study_design_scores_gemma":[0.00001397562,0.0001652672,0.001981713,0.000007713979,0.000008419874,0.0001946332,0.00002208606,0.9217387,0.06939976,0.001707218,0.00474657,0.0000137734],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.4118238,0.00116871,0.5621386,0.0002760751,0.00004538339,0.0001148936,0.0001692063,0.0002857782,0.02397753],"genre_scores_gemma":[0.9035076,0.0003283493,0.09172868,0.00002876495,0.00001461984,0.00008922236,0.00006587691,0.00002045099,0.004216309],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.0006529755,"threshold_uncertainty_score":0.002184391,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.00864255714686964,"score_gpt":0.2220022752728831,"score_spread":0.2133597181260135,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}