{"id":"W2099809776","doi":"10.1109/ccece.2003.1226361","title":"Design & fabrication of out-of-plane electrostatic actuators for optical application","year":2004,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":6,"is_retracted":false,"has_abstract":true,"ca_institutions":"Concordia University","funders":"Natural Sciences and Engineering Research Council of Canada; Concordia University","keywords":"Cantilever; Microelectromechanical systems; Actuator; Fabrication; Materials science; Electrostatics; Stress (linguistics); Displacement (psychology); Optical fiber; Mechanical engineering; Optoelectronics; Optics; Engineering; Composite material; Electrical engineering; Physics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00004249328,0.000058311,0.0001017279,0.00004502411,0.000009483832,0.000001604249,0.00006244674,0.00005232289,0.000002600389],"category_scores_gemma":[0.00003854773,0.00005238212,0.00001877832,0.0000783373,0.00002418651,0.00004149106,0.000004533452,0.00003540198,0.000006214175],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00003148353,"about_ca_system_score_gemma":0.000008745859,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000002291928,"about_ca_topic_score_gemma":0.000005268834,"domain_scores_codex":[0.9996405,5.607466e-7,0.0001445188,0.0000691341,0.00004773021,0.00009755796],"domain_scores_gemma":[0.9997222,0.00006337847,0.00003028868,0.0001340877,0.00003674221,0.00001331101],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000009329559,0.00001942689,0.000002682469,0.00005263908,0.00001152284,2.284846e-8,0.00005782801,0.01164412,0.9357148,0.01297232,0.00006288887,0.03945246],"study_design_scores_gemma":[0.0001882815,0.00006413586,0.00003729009,0.000006636865,0.00000886964,6.227552e-7,0.00002301558,0.0007635602,0.9751496,0.02327747,0.0004184211,0.00006207768],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.07440516,0.00003297859,0.9249229,0.00002771017,0.00002531565,0.000278345,0.000002036662,0.0001628429,0.0001427034],"genre_scores_gemma":[0.6480662,0.00003094333,0.3518085,0.000002218511,0.000005526806,0.00005490496,0.00000782003,0.000008237187,0.00001567744],"genre_candidate":"methods","genre_consensus":null,"teacher_disagreement_score":0.573661,"threshold_uncertainty_score":0.2136081,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0195956117204213,"score_gpt":0.2603241933168967,"score_spread":0.2407285815964754,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}