{"id":"W2100272413","doi":"10.1109/mwsym.2012.6259646","title":"Microwave susceptor design for wafer bonding applications","year":2012,"lang":"en","type":"article","venue":"","topic":"3D IC and TSV technologies","field":"Engineering","cited_by":4,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta","funders":"Natural Sciences and Engineering Research Council of Canada; CMC Microsystems","keywords":"Susceptor; Microwave; Microwave oven; Wafer; Materials science; Microwave heating; Optoelectronics; Computer science; Process engineering; Nanotechnology; Telecommunications; Engineering; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00005579723,0.00005951695,0.00005522577,0.00003663464,0.00003552492,0.000008511578,0.00007128633,0.00005699975,0.00005553336],"category_scores_gemma":[0.000007383635,0.0000521918,0.00002490634,0.00006123478,0.00001331553,0.00007511222,0.00001183029,0.00003735003,0.0001095083],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0000255022,"about_ca_system_score_gemma":0.000002344129,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":5.450762e-7,"about_ca_topic_score_gemma":4.922202e-7,"domain_scores_codex":[0.9996625,0.00000146658,0.00006500237,0.0000481718,0.000023298,0.0001995335],"domain_scores_gemma":[0.9998003,0.00004718776,0.000005571343,0.0001107583,0.00000934199,0.00002683669],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"theoretical_or_conceptual","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000004473191,0.00005124353,0.001205858,0.0001084499,0.00008408802,1.188943e-7,0.0002438834,0.0004766609,0.2418154,0.4344526,0.2486619,0.07289536],"study_design_scores_gemma":[0.0001602999,0.00001381456,0.0001750317,0.000004079947,0.00001618722,0.00000249652,0.0002905544,0.002184647,0.636187,0.004201523,0.356557,0.0002074409],"study_design_candidate":"bench_or_experimental","study_design_consensus":null,"genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.002243723,0.0004051143,0.986002,0.00004930827,0.00008337401,0.0003028723,0.000002271712,0.0008974152,0.01001394],"genre_scores_gemma":[0.8698371,0.000009072883,0.1283428,0.00001641205,0.00007715726,0.0002991613,0.000003294214,0.00001582257,0.001399184],"genre_candidate":"methods","genre_consensus":null,"teacher_disagreement_score":0.8675934,"threshold_uncertainty_score":0.212832,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02937579427624309,"score_gpt":0.2340175017716946,"score_spread":0.2046417074954515,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}