{"id":"W2100272413","doi":"10.1109/mwsym.2012.6259646","title":"Microwave susceptor design for wafer bonding applications","year":2012,"lang":"en","type":"article","venue":"","topic":"3D IC and TSV technologies","field":"Engineering","cited_by":4,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta","funders":"Natural Sciences and Engineering Research Council of Canada; CMC Microsystems","keywords":"Susceptor; Microwave; Microwave oven; Wafer; Materials science; Microwave heating; Optoelectronics; Computer science; Process engineering; Nanotechnology; Telecommunications; Engineering; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003473855,0.0004400121,0.0003008076,0.0002887501,0.000215899,0.0004565972,0.0009517129,0.0005113093,0.002049478],"category_scores_gemma":[0.000382201,0.0002461157,0.000235612,0.0001996642,0.0001892702,0.0006757723,0.0003083883,0.0003568582,0.000966159],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002921506,"about_ca_system_score_gemma":0.0003198884,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002669045,"about_ca_topic_score_gemma":0.0006001773,"domain_scores_codex":[0.9997841,0.00003262566,0.00001069901,0.00003785152,0.0001009746,0.00003385328],"domain_scores_gemma":[0.9998581,0.00001744581,0.00003812139,0.00002039153,0.00005559891,0.00001037142],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00009101583,0.00002632725,0.0003137515,0.0004033974,0.00002118664,0.0001666686,0.00009900699,0.001617473,0.9533287,0.0160102,0.00122072,0.02670164],"study_design_scores_gemma":[0.00004851928,0.001305177,0.001775712,0.00007092194,0.00008656915,0.001269067,0.0001000399,0.02667606,0.8677176,0.001472114,0.09944332,0.00003492394],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.332897,0.01101342,0.6154562,0.0005112527,0.0007660852,0.0004733693,0.0002499012,0.001903039,0.03672974],"genre_scores_gemma":[0.7940384,0.002835467,0.1910581,0.0001576368,0.0001420879,0.0002602342,0.0002275822,0.0001847284,0.01109577],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.002049478,"threshold_uncertainty_score":0.006856203,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02937579427624309,"score_gpt":0.2340175017716946,"score_spread":0.2046417074954515,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}