{"id":"W2100610827","doi":"10.1117/12.887553","title":"Measurement of the point spread function of a soft x-ray microscope by single pixel exposure of photoresists","year":2011,"lang":"en","type":"article","venue":"Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE","topic":"Advanced X-ray Imaging Techniques","field":"Physics and Astronomy","cited_by":9,"is_retracted":false,"has_abstract":true,"ca_institutions":"McMaster University","funders":"","keywords":"Optics; Photoresist; Microscope; Zone plate; Point spread function; Lithography; Materials science; Monochromatic color; Fabrication; Resist; Depth of focus (tectonics); Optoelectronics; Physics; Nanotechnology; Diffraction","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003347468,0.000445334,0.0003876786,0.0005279261,0.0002559003,0.0003651743,0.0004826399,0.0005308985,0.001437108],"category_scores_gemma":[0.0007093824,0.0002320567,0.0002449698,0.00048367,0.0003725986,0.0003529561,0.0003528269,0.0006334734,0.0002620664],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005005145,"about_ca_system_score_gemma":0.0002016053,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0006354307,"about_ca_topic_score_gemma":0.0008208093,"domain_scores_codex":[0.9996514,0.00002524862,0.00001958017,0.0001129496,0.0001576901,0.00003314443],"domain_scores_gemma":[0.9990094,0.0003361743,0.0002020505,0.0001782029,0.0002064485,0.00006765465],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001825476,0.00001010019,0.0002422209,0.00001593376,0.000004105802,0.00001325918,0.00002440309,0.000112369,0.9985412,0.00003191224,0.00001008901,0.0009762348],"study_design_scores_gemma":[0.000001700124,0.0001130787,0.00356394,0.000001369302,0.000008481301,0.00005879396,0.00001517445,0.001210023,0.9948635,0.00001853639,0.0001417364,0.000003636241],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.980018,0.0003491087,0.01822906,0.00002986631,0.00001642028,0.00003644326,0.0001304281,0.0001709199,0.001019636],"genre_scores_gemma":[0.9711508,0.0004991121,0.02623733,0.00003115924,0.00001203883,0.00006638493,0.000197998,0.00007154972,0.001733653],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001437108,"threshold_uncertainty_score":0.004807591,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01315987758716682,"score_gpt":0.2141900136788338,"score_spread":0.201030136091667,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}