{"id":"W2100703109","doi":"10.1364/ao.39.001053","title":"Application of in situ ellipsometry in the fabrication of thin-film optical coatings on semiconductors","year":2000,"lang":"en","type":"article","venue":"Applied Optics","topic":"Liquid Crystal Research Advancements","field":"Materials Science","cited_by":10,"is_retracted":false,"has_abstract":true,"ca_institutions":"Nortel (Canada); McMaster University","funders":"","keywords":"Materials science; Ellipsometry; Refractive index; Optics; Thin film; Optoelectronics; Optical filter; Semiconductor; Chemical vapor deposition; Optical coating; Fabrication; Reflection (computer programming); Nanotechnology","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0007755295,0.0006968367,0.0003779441,0.0005029898,0.0003191583,0.0004729104,0.0006985338,0.0003804232,0.0006712666],"category_scores_gemma":[0.001386897,0.0004808504,0.0002152607,0.0003382645,0.0003213315,0.0004048541,0.0003968946,0.000754494,0.0002800705],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003004336,"about_ca_system_score_gemma":0.0001981455,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0005685897,"about_ca_topic_score_gemma":0.001280361,"domain_scores_codex":[0.9995333,0.0001354125,0.00003582373,0.00007680778,0.0001699738,0.00004866209],"domain_scores_gemma":[0.9989145,0.0005226475,0.0001772702,0.0002154556,0.0001330885,0.00003700825],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001971531,0.000008204413,0.000115085,0.00004224154,0.000004258793,0.00001266659,0.00002162713,0.00008197346,0.9954575,0.000138024,0.00002946995,0.004069255],"study_design_scores_gemma":[0.000001709069,0.00001908712,0.0002212137,0.000002256273,0.000005096799,0.00003985886,0.000006503077,0.0009415188,0.998289,0.00002055082,0.0004501194,0.00000297999],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"methods","genre_scores_codex":[0.7035317,0.005346062,0.2827679,0.0002823664,0.0002459224,0.0001433514,0.0003819203,0.0009845857,0.006316293],"genre_scores_gemma":[0.8075814,0.003449135,0.1863713,0.00007115979,0.00005333323,0.00008669669,0.0002255421,0.0001333823,0.002028076],"genre_candidate":"methods","genre_consensus":null,"teacher_disagreement_score":0.0007755295,"threshold_uncertainty_score":0.004101455,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01789269860983247,"score_gpt":0.2874259355893289,"score_spread":0.2695332369794964,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}