{"id":"W2100703109","doi":"10.1364/ao.39.001053","title":"Application of in situ ellipsometry in the fabrication of thin-film optical coatings on semiconductors","year":2000,"lang":"en","type":"article","venue":"Applied Optics","topic":"Liquid Crystal Research Advancements","field":"Materials Science","cited_by":10,"is_retracted":false,"has_abstract":true,"ca_institutions":"Nortel (Canada); McMaster University","funders":"","keywords":"Materials science; Ellipsometry; Refractive index; Optics; Thin film; Optoelectronics; Optical filter; Semiconductor; Chemical vapor deposition; Optical coating; Fabrication; Reflection (computer programming); Nanotechnology","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0007837083,0.00009441648,0.0001725648,0.0001132,0.00002214068,0.00001390438,0.000410453,0.00005974129,0.00006493658],"category_scores_gemma":[0.0001350849,0.000074446,0.00001940267,0.000540829,0.0001407525,0.00008749981,0.00004241979,0.0001510772,0.00006607724],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00006981787,"about_ca_system_score_gemma":0.00003580879,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00003410704,"about_ca_topic_score_gemma":0.00001111583,"domain_scores_codex":[0.99856,0.00004558434,0.0004146238,0.0002222843,0.0005291658,0.0002283314],"domain_scores_gemma":[0.9991057,0.0003050219,0.0001215719,0.0003827332,0.00005168121,0.00003328886],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00008544582,0.0002527378,0.0003815002,0.00003637368,0.000001187295,4.939299e-7,0.0005814533,0.006910392,0.9725029,0.01724947,0.00001636878,0.001981665],"study_design_scores_gemma":[0.0004836715,0.0001264669,0.003776116,0.00002508276,0.000004141905,5.838956e-7,0.000570958,0.001947817,0.9895067,0.003321364,0.00013852,0.00009855312],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9871252,0.00001061617,0.0007547157,0.00006485703,0.00001559616,0.0005123757,0.000006571823,0.000009839172,0.01150027],"genre_scores_gemma":[0.9960968,0.00002827808,0.003648947,0.00007756043,0.00001860632,0.00007549824,0.00001294435,0.000009667408,0.00003168827],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.01700381,"threshold_uncertainty_score":0.303582,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01789269860983247,"score_gpt":0.2874259355893289,"score_spread":0.2695332369794964,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}