{"id":"W2101808811","doi":"10.1109/jmems.2008.2008626","title":"Linear Bilayer ALD Coated MEMS Varactor With High Tuning Capacitance Ratio","year":2008,"lang":"en","type":"article","venue":"Journal of Microelectromechanical Systems","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":25,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Varicap; Capacitance; Materials science; Microelectromechanical systems; Optoelectronics; Deep reactive-ion etching; Bilayer; Dielectric; Atomic layer deposition; Composite material; Etching (microfabrication); Reactive-ion etching; Layer (electronics); Membrane; Chemistry; Electrode","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002082277,0.000251673,0.0005878643,0.0001721141,0.0001023457,0.00002517423,0.0002900253,0.0001985232,0.00001319124],"category_scores_gemma":[0.00005659072,0.0001824725,0.00009541788,0.0003878926,0.00004889645,0.0002805952,0.00001315706,0.000740631,0.00001246082],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002126712,"about_ca_system_score_gemma":0.0000554763,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00002217738,"about_ca_topic_score_gemma":0.000008228868,"domain_scores_codex":[0.9984181,0.00001772655,0.0006494051,0.000161021,0.0003219565,0.0004318229],"domain_scores_gemma":[0.9990486,0.00008793958,0.0002935758,0.0002250135,0.0002176769,0.000127231],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00005481302,0.00002970168,0.00001188833,0.00003468465,0.0001240479,0.0001921751,0.00005158669,0.001887974,0.9966378,0.000204261,0.0006247123,0.0001463073],"study_design_scores_gemma":[0.0009830055,0.0009919018,0.00004500223,0.0002392055,0.00003615845,0.003806403,0.000112352,0.002420097,0.9853377,0.0001007012,0.005585296,0.0003421572],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9183473,0.001591687,0.07896551,0.00007564648,0.0005489761,0.0001688357,0.000005321548,0.000253403,0.00004331443],"genre_scores_gemma":[0.9944771,0.0007685277,0.004231463,0.00002150749,0.0003019072,0.000008213552,0.000001731029,0.00005919573,0.0001303808],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.07612977,"threshold_uncertainty_score":0.7441011,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0129167138827096,"score_gpt":0.1983527641686266,"score_spread":0.185436050285917,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}