{"id":"W2101808811","doi":"10.1109/jmems.2008.2008626","title":"Linear Bilayer ALD Coated MEMS Varactor With High Tuning Capacitance Ratio","year":2008,"lang":"en","type":"article","venue":"Journal of Microelectromechanical Systems","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":25,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Varicap; Capacitance; Materials science; Microelectromechanical systems; Optoelectronics; Deep reactive-ion etching; Bilayer; Dielectric; Atomic layer deposition; Composite material; Etching (microfabrication); Reactive-ion etching; Layer (electronics); Membrane; Chemistry; Electrode","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002296157,0.0003693237,0.0003756805,0.0002723776,0.0002732479,0.0003363754,0.0005632744,0.000460728,0.0007270437],"category_scores_gemma":[0.0002794005,0.0002551278,0.0002191608,0.0003009895,0.0001525484,0.0003253198,0.0002651322,0.0004251668,0.0006332513],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004547986,"about_ca_system_score_gemma":0.0002224134,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001157447,"about_ca_topic_score_gemma":0.002095368,"domain_scores_codex":[0.9997048,0.00001440807,0.0000138181,0.00008469112,0.0001330932,0.00004911611],"domain_scores_gemma":[0.9996927,0.00004110288,0.00006123003,0.00003146557,0.000131979,0.00004157446],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001440235,0.000003288382,0.00004713692,0.000008943543,0.00000206916,0.00001911228,0.000004626818,0.00002530441,0.9992829,0.00002608864,0.00005018157,0.0005159529],"study_design_scores_gemma":[0.00002176991,0.0001330204,0.001642046,0.000001986045,0.00001730011,0.0001946813,0.00001338661,0.002345777,0.9937432,0.00001938203,0.001854196,0.00001327198],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9643568,0.001297613,0.0291879,0.0003375656,0.0002594537,0.00004321882,0.0005338373,0.001031404,0.002952188],"genre_scores_gemma":[0.9716853,0.0004829148,0.02374644,0.0001313262,0.00006317909,0.00002928885,0.0002645814,0.00009098813,0.003506069],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001157447,"threshold_uncertainty_score":0.003299832,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0129167138827096,"score_gpt":0.1983527641686266,"score_spread":0.185436050285917,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}