{"id":"W2101979570","doi":"10.1109/cjece.2004.1532523","title":"Modelling surface-micromachined electrothermal actuators","year":2004,"lang":"en","type":"article","venue":"Canadian Journal of Electrical and Computer Engineering","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":22,"is_retracted":false,"has_abstract":true,"ca_institutions":"Simon Fraser University","funders":"","keywords":"Actuator; Surface micromachining; Mechanical engineering; Process (computing); Materials science; Surface (topology); Computer science; Engineering; Electrical engineering; Fabrication","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":true,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00004417276,0.0001376158,0.0001868468,0.0001904642,0.00004217447,0.00003566653,0.0001245153,0.00007547549,0.00000226046],"category_scores_gemma":[0.000006766588,0.0001279741,0.00004996728,0.0002008826,0.00001459692,0.0001201407,0.000005505738,0.00035671,8.798959e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001310737,"about_ca_system_score_gemma":0.00007571131,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001149055,"about_ca_topic_score_gemma":0.00004707673,"domain_scores_codex":[0.999331,0.000001340597,0.0001914622,0.00007562908,0.00005766398,0.0003428943],"domain_scores_gemma":[0.9995948,0.00002357276,0.00002330422,0.00006092603,0.00002650758,0.0002708664],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"simulation_or_modeling","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.000001620827,0.000002366336,0.00002140073,0.000008497174,0.00002804347,0.00006266793,0.00005020488,0.9850448,0.004571358,0.0009012945,0.00002412996,0.009283572],"study_design_scores_gemma":[0.0006381016,0.0002284043,0.0002757859,0.00009261414,0.00001768562,0.0005364846,0.000004611502,0.9720144,0.02152163,0.00144767,0.002851202,0.0003713818],"study_design_candidate":"simulation_or_modeling","study_design_consensus":"simulation_or_modeling","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.5519555,0.001461014,0.4463581,0.00002535698,0.0001080353,0.00002390899,5.356275e-7,0.00005438528,0.00001320808],"genre_scores_gemma":[0.9683263,0.0001409275,0.03137205,0.00001762518,0.0001153103,4.74172e-7,2.961521e-7,0.00002448934,0.000002538373],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.4163708,"threshold_uncertainty_score":0.5218634,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.004063947041652857,"score_gpt":0.153691159636764,"score_spread":0.1496272125951111,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}