{"id":"W2102068683","doi":"10.1109/cleo.2006.4627850","title":"F<inf>2</inf> laser patterning indium tin oxide (ITO) thin film coating on glass substrates","year":2006,"lang":"en","type":"article","venue":"","topic":"Laser Material Processing Techniques","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Toronto","funders":"","keywords":"Indium tin oxide; Tin; Laser ablation; Thin film; Materials science; Indium; Oxide; Coating; Laser; Electrode; Stoichiometry; Biochip; Optoelectronics; Chemical engineering; Analytical Chemistry (journal); Nanotechnology; Chemistry; Optics; Organic chemistry; Physics; Metallurgy; Physical chemistry; Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001387066,0.0002589162,0.000212451,0.0002169737,0.0003454053,0.0003494932,0.000415705,0.0003457539,0.006461313],"category_scores_gemma":[0.0002528033,0.0001806629,0.0001521622,0.0001864448,0.0003638836,0.0002266082,0.0001977614,0.0002418011,0.001437064],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000517027,"about_ca_system_score_gemma":0.0002353083,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00293359,"about_ca_topic_score_gemma":0.005060133,"domain_scores_codex":[0.9998404,0.00001008922,0.000006983288,0.00004216618,0.000056405,0.00004388027],"domain_scores_gemma":[0.9998626,0.00004405232,0.00001894004,0.00003004984,0.00002819975,0.00001612345],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004040308,0.00000937031,0.0001598263,0.00002827198,0.000002624683,0.0001403811,0.00003036542,0.0001436747,0.9957694,0.0001488997,0.0005223987,0.003004487],"study_design_scores_gemma":[0.000007663793,0.00006068046,0.001716721,0.000002997003,0.000004620244,0.0001180503,0.00002295697,0.001154757,0.9934903,0.00002498407,0.003390002,0.00000624874],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9490322,0.0008022758,0.02095242,0.0003161082,0.0002384697,0.00008561224,0.0008663021,0.0008192642,0.02688724],"genre_scores_gemma":[0.9256142,0.0005592541,0.05308478,0.00009442392,0.00003488442,0.00006269669,0.0006404302,0.0001919833,0.01971745],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.006461313,"threshold_uncertainty_score":0.02161527,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008343935811469996,"score_gpt":0.2065883968363594,"score_spread":0.1982444610248894,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}