{"id":"W2102448875","doi":"","title":"Femtosecond laser micromachined grooves cut in silicon with 400 nm and 800 nm pulses","year":2003,"lang":"en","type":"article","venue":"Conference on Lasers and Electro-Optics","topic":"Laser Material Processing Techniques","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"McMaster University","funders":"","keywords":"Silicon; Materials science; Femtosecond; Laser; Optoelectronics; Surface micromachining; Optics; Ultrafast optics; Fabrication; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00009566682,0.0002307253,0.0002918733,0.000214012,0.0002543438,0.0001706185,0.0003127747,0.0003595083,0.001222315],"category_scores_gemma":[0.0003133505,0.0002435452,0.0001636155,0.0002742702,0.0002347219,0.0002011238,0.0001520619,0.0003242528,0.0001862313],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002413616,"about_ca_system_score_gemma":0.0002347989,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00195969,"about_ca_topic_score_gemma":0.003287677,"domain_scores_codex":[0.9998086,0.000005771184,0.000011824,0.00005129516,0.00008368654,0.00003883059],"domain_scores_gemma":[0.9996197,0.00009841368,0.0001051275,0.00006760204,0.00007628413,0.00003291796],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000656731,0.00002104494,0.0007883426,0.00002460291,0.000005650476,0.00005428305,0.00005767379,0.0003590766,0.9964721,0.00004734774,0.00004137,0.002062766],"study_design_scores_gemma":[0.00001712358,0.0004024195,0.01711929,0.00000412598,0.00001054985,0.0003001021,0.0000606366,0.004072342,0.9769279,0.00006469284,0.001010834,0.000009922074],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9972067,0.00013728,0.001803259,0.0000119115,0.00001433273,0.00001499839,0.0001006083,0.00008163496,0.0006290944],"genre_scores_gemma":[0.9892703,0.0001382903,0.00887805,0.00001259605,0.000006936665,0.00002182005,0.0002017674,0.00002122769,0.001449043],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.00195969,"threshold_uncertainty_score":0.004089057,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008423532577068155,"score_gpt":0.2046728965222385,"score_spread":0.1962493639451704,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}