{"id":"W2102519104","doi":"10.1109/nanoel.2006.1609768","title":"Enhanced Control of Morphology in Thin Film Nanostructure Arrays","year":2006,"lang":"en","type":"article","venue":"2006 IEEE Conference on Emerging Technologies - Nanoelectronics","topic":"Optical Coatings and Gratings","field":"Materials Science","cited_by":3,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Materials science; Nanostructure; Hillock; Substrate (aquarium); Thin film; Wafer; Tilt (camera); Silicon; Optics; Tetragonal crystal system; Rotation (mathematics); Optoelectronics; Nanotechnology; Composite material; Crystallography; Crystal structure; Chemistry; Computer science; Physics; Geometry","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00008459417,0.0002177212,0.0001868057,0.0001338632,0.0001118731,0.0003607969,0.0003088002,0.0001981617,0.0006131562],"category_scores_gemma":[0.0002804598,0.0003045883,0.0001012144,0.000150145,0.0001979787,0.0002609339,0.0002435726,0.0003540691,0.0002152427],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002850835,"about_ca_system_score_gemma":0.0001246263,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003310422,"about_ca_topic_score_gemma":0.0009549974,"domain_scores_codex":[0.9998993,0.000007774322,0.000006690096,0.00002166558,0.0000453657,0.00001916376],"domain_scores_gemma":[0.9998121,0.00004507305,0.0000436633,0.00003997644,0.00004166771,0.00001762462],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001337654,0.000004808536,0.00005438914,0.00001360403,8.95328e-7,0.0000208422,0.000009899633,0.0002077206,0.9978769,0.0001140911,0.00004133152,0.001642111],"study_design_scores_gemma":[0.00001639452,0.0000723038,0.001112203,0.000002822449,0.000002124278,0.0001003487,0.000009923107,0.005887273,0.9914696,0.00007899054,0.001242813,0.000005197475],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9752381,0.0005984749,0.01965907,0.00008187193,0.00005062933,0.00003200365,0.00009722662,0.0004568589,0.003785774],"genre_scores_gemma":[0.9757162,0.0003532183,0.02162251,0.00005228786,0.00001641227,0.0000271278,0.00008927259,0.00008833138,0.002034526],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0006131562,"threshold_uncertainty_score":0.00206846,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008558361897490546,"score_gpt":0.2347666535980799,"score_spread":0.2262082917005893,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}