{"id":"W2103183826","doi":"10.1109/icmens.2005.67","title":"MEMS Design for Fabrication","year":2006,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":3,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Microelectromechanical systems; Microfabrication; Fabrication; Parametric statistics; Commercialization; Process (computing); Computer science; Parametric design; Focus (optics); Electronic engineering; Mechanical engineering; Systems engineering; Engineering; Materials science; Nanotechnology","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0005918784,0.001074515,0.0008080358,0.0006240978,0.0006818001,0.001255945,0.001112379,0.001086825,0.02106706],"category_scores_gemma":[0.0007814725,0.000484437,0.0007985621,0.0004508389,0.0004002048,0.0007665156,0.001232606,0.001015569,0.01343005],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00101869,"about_ca_system_score_gemma":0.00111162,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0006025399,"about_ca_topic_score_gemma":0.0007541702,"domain_scores_codex":[0.999032,0.00008581677,0.00003057458,0.0001204498,0.0006752149,0.00005583293],"domain_scores_gemma":[0.9997548,0.00002491464,0.00002414522,0.00007143582,0.0001076645,0.00001703951],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"design_other","study_design_gemma":"not_applicable","study_design_scores_codex":[0.0001183782,0.00006577971,0.0005302516,0.001551138,0.000154892,0.0003138417,0.0001722762,0.0721862,0.1335718,0.3440283,0.07166499,0.3756422],"study_design_scores_gemma":[0.00003381077,0.0001794753,0.0006171691,0.0001457876,0.00004075372,0.0004758432,0.00002332263,0.07191385,0.02358052,0.03171977,0.871228,0.00004171109],"study_design_candidate":"not_applicable","study_design_consensus":null,"genre_codex":"methods","genre_gemma":"methods","genre_scores_codex":[0.005144389,0.007289859,0.8096936,0.001559419,0.001666064,0.0006125551,0.001342384,0.004479286,0.1682125],"genre_scores_gemma":[0.1376196,0.008819193,0.6789147,0.0007946249,0.0005648281,0.00162554,0.002549849,0.001552712,0.1675588],"genre_candidate":"methods","genre_consensus":"methods","teacher_disagreement_score":0.02106706,"threshold_uncertainty_score":0.07047629,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01719101659065665,"score_gpt":0.2224981125328858,"score_spread":0.2053070959422292,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}