{"id":"W2104735782","doi":"10.1115/detc2012-71268","title":"Low Voltage Electrostatic Actuation and Displacement Measurement Through Resonant Drive Circuit","year":2012,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":14,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Actuator; Voltage; Capacitance; Comb drive; Microelectromechanical systems; Displacement (psychology); Capacitor; Control theory (sociology); Materials science; Electrical engineering; Engineering; Physics; Computer science; Optoelectronics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001862038,0.0002581142,0.0002158263,0.0002595678,0.0002157144,0.0002837032,0.0006797233,0.0005048941,0.001244056],"category_scores_gemma":[0.0006054109,0.0001875348,0.0001020176,0.000196305,0.0003411527,0.000584074,0.0005482751,0.0002858693,0.0003237018],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003750919,"about_ca_system_score_gemma":0.0001954945,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003518981,"about_ca_topic_score_gemma":0.0005015628,"domain_scores_codex":[0.9994537,0.00004275146,0.0000208731,0.0001215462,0.0003244047,0.00003669033],"domain_scores_gemma":[0.9997266,0.0001099437,0.00005634697,0.00003422081,0.00005673412,0.00001612278],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002609831,0.0000116792,0.0002252173,0.00004691955,0.000003061112,0.00003101163,0.00002711536,0.0003630418,0.9914398,0.0007051044,0.0001215843,0.006999312],"study_design_scores_gemma":[0.00001933668,0.0001369175,0.001407231,0.000005133052,0.000006881253,0.0001959573,0.00002817874,0.01996426,0.97536,0.0003643935,0.002490674,0.00002111662],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7840561,0.001440955,0.2004838,0.0005498481,0.0001909418,0.0001255681,0.0003805411,0.00136474,0.01140748],"genre_scores_gemma":[0.9403329,0.0002568564,0.05720637,0.0001339063,0.00003281368,0.00006003077,0.00006976107,0.00004258853,0.001864705],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001244056,"threshold_uncertainty_score":0.004161835,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0216334849154273,"score_gpt":0.2276191016614178,"score_spread":0.2059856167459905,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}