{"id":"W2104996817","doi":"10.1109/sensor.2007.4300336","title":"Design and Fabrication of an Electrostatic Micromotor with a Low Operating Voltage","year":2007,"lang":"en","type":"article","venue":"TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":10,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Rotor (electric); Voltage; Fabrication; Torque; Electrical engineering; Low voltage; Computer science; Engineering; Materials science; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004029607,0.0005151221,0.0004621628,0.000186313,0.0003834064,0.0003877525,0.0005788123,0.0006389615,0.0009398078],"category_scores_gemma":[0.0004102701,0.0004059953,0.0002108828,0.0001015825,0.0003318464,0.0004503186,0.0003193302,0.0005016391,0.000704167],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004360689,"about_ca_system_score_gemma":0.0005846142,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004202127,"about_ca_topic_score_gemma":0.0006697375,"domain_scores_codex":[0.9997215,0.00002274142,0.00002242056,0.00008144855,0.000117228,0.00003464443],"domain_scores_gemma":[0.9996924,0.00006644573,0.00005735113,0.00003554532,0.00009975894,0.00004857585],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000299985,0.00002204727,0.0001742956,0.00008909316,0.000004511288,0.00007916452,0.00002322306,0.0003711592,0.9922717,0.000447718,0.0001954,0.006291618],"study_design_scores_gemma":[0.00005798509,0.000635389,0.001474514,0.00000810425,0.00001611655,0.0005017605,0.00001606502,0.009090714,0.9785784,0.0001074866,0.009494715,0.00001868255],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.5347004,0.00185341,0.451341,0.001132612,0.0004562595,0.0009307924,0.0004427215,0.001789538,0.007353259],"genre_scores_gemma":[0.5806569,0.0003826868,0.4144234,0.000165435,0.00005115524,0.0002729421,0.0002280235,0.000113688,0.003705696],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0009398078,"threshold_uncertainty_score":0.003163934,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007695466716684546,"score_gpt":0.2357421794569399,"score_spread":0.2280467127402554,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}