{"id":"W2105634449","doi":"10.1116/1.3694010","title":"Dopant depletion in the near surface region of thermally prepared silicon (100) in UHV","year":2012,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena","topic":"Thin-Film Transistor Technologies","field":"Engineering","cited_by":38,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta; National Institute for Nanotechnology","funders":"Canadian Institute for Advanced Research","keywords":"Dopant; Dangling bond; Silicon; Doping; Analytical Chemistry (journal); Scanning tunneling microscope; Materials science; Hydrogen; Chemistry; Optoelectronics; Nanotechnology","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.003057051,0.0002190055,0.0004415097,0.0007555164,0.0001585651,0.00005166699,0.0006657544,0.0003592379,0.000001055535],"category_scores_gemma":[0.0001081178,0.0001654594,0.00002365271,0.001282253,0.001170611,0.0004495514,0.00006347685,0.000538345,2.761236e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002827638,"about_ca_system_score_gemma":0.0001890224,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000006220644,"about_ca_topic_score_gemma":0.00003056132,"domain_scores_codex":[0.9982026,0.00005592469,0.0006153177,0.0002118824,0.0002851415,0.0006290925],"domain_scores_gemma":[0.9992238,0.00002019204,0.0003380115,0.0002418986,0.0001473292,0.00002872756],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00005775694,0.00007720195,0.003084579,0.0001041794,0.0000123195,0.000005006022,0.001198062,0.00007014852,0.9872968,0.001050201,0.000003845964,0.007039887],"study_design_scores_gemma":[0.0006893344,0.0003738246,0.003261797,0.0002280787,0.00003603001,0.0004820865,0.001178639,0.0001136044,0.9899069,0.003273282,0.0002554937,0.0002009076],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9780419,0.02012014,0.0004580789,0.000874052,0.0001394609,0.0002305161,0.000001005692,0.0001159485,0.00001892658],"genre_scores_gemma":[0.9976448,0.001568765,0.000732006,0.00001525812,0.00001250247,0.000009875351,2.297047e-7,0.00001569456,8.822952e-7],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.01960292,"threshold_uncertainty_score":0.6747237,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01646767485881536,"score_gpt":0.2196526733202979,"score_spread":0.2031849984614825,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}