{"id":"W2105955725","doi":"10.1039/c1lc20623k","title":"Parylene C coating for high-performance replica molding","year":2011,"lang":"en","type":"article","venue":"Lab on a Chip","topic":"Nanofabrication and Lithography Techniques","field":"Engineering","cited_by":20,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of British Columbia","funders":"Canadian Institutes of Health Research","keywords":"Parylene; Materials science; Fabrication; Microfabrication; Coating; PDMS stamp; Polymer; Soft lithography; Molding (decorative); Wafer; Chemical vapor deposition; Nanotechnology; Mold; Nanometre; Photolithography; Silicon; Conformal coating; Composite material; Optoelectronics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000268531,0.0006346844,0.0002422098,0.0002771156,0.0001897549,0.0003018093,0.000541183,0.0003932131,0.00355929],"category_scores_gemma":[0.0004978406,0.0003165154,0.0003303489,0.0002011457,0.0002077448,0.0003482824,0.0002102252,0.0006214553,0.001731526],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002792618,"about_ca_system_score_gemma":0.0002524752,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0005175057,"about_ca_topic_score_gemma":0.0007936312,"domain_scores_codex":[0.9995826,0.00002961409,0.00002770644,0.0001059335,0.0002111753,0.00004294634],"domain_scores_gemma":[0.9996071,0.0001100359,0.00009532205,0.000110921,0.00005676685,0.00001987081],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001761772,0.00001367951,0.00008591969,0.0001001035,0.000006067369,0.0001006496,0.00001397213,0.0002279625,0.9890892,0.0003143678,0.0003327841,0.009697688],"study_design_scores_gemma":[0.000008584334,0.0001157508,0.001061957,0.000005576634,0.00001001204,0.0004249578,0.000004608599,0.001928792,0.9812118,0.00006010641,0.01515847,0.00000939018],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.5254647,0.008214677,0.4327201,0.0006007336,0.0009724958,0.001217627,0.001264792,0.003700342,0.02584455],"genre_scores_gemma":[0.7149954,0.004440099,0.2641618,0.000248384,0.0001325891,0.0004095285,0.001240365,0.0005611883,0.01381067],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.00355929,"threshold_uncertainty_score":0.01190704,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02379812626743793,"score_gpt":0.2224344230372952,"score_spread":0.1986362967698572,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}