{"id":"W2106326364","doi":"10.1109/35.965375","title":"MEMS optical switches","year":2001,"lang":"en","type":"article","venue":"IEEE Communications Magazine","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":139,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Toronto","funders":"","keywords":"Microelectromechanical systems; Optical switch; Scalability; Fabrication; Actuator; Surface micromachining; Computer science; Process (computing); Electronic engineering; Materials science; Nanotechnology; Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002254604,0.0005420997,0.0002878793,0.0005346952,0.0008951362,0.001156692,0.0006210823,0.0009356028,0.01162971],"category_scores_gemma":[0.0002986316,0.000240329,0.0003006728,0.0005540472,0.0004112578,0.001363138,0.0007321349,0.0006558613,0.004884223],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003873195,"about_ca_system_score_gemma":0.0002162131,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001960663,"about_ca_topic_score_gemma":0.0004452267,"domain_scores_codex":[0.9996802,0.00002365272,0.00001253835,0.00005532938,0.000177817,0.00005061027],"domain_scores_gemma":[0.9999044,0.00002076719,0.00001298063,0.00001933127,0.00002962942,0.00001280942],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"not_applicable","study_design_scores_codex":[0.0001461556,0.000107426,0.0005445307,0.0008561533,0.00004109089,0.0004867878,0.0002191824,0.0008969176,0.3889236,0.1551414,0.07693011,0.3757067],"study_design_scores_gemma":[0.00001795429,0.0001201851,0.0009224559,0.00006961462,0.00002270546,0.001029468,0.00007922243,0.00208916,0.1832319,0.01370564,0.798687,0.00002470627],"study_design_candidate":"not_applicable","study_design_consensus":null,"genre_codex":"other","genre_gemma":"methods","genre_scores_codex":[0.05803221,0.09596977,0.1547225,0.006171605,0.009437945,0.0005041051,0.002327924,0.004439963,0.668394],"genre_scores_gemma":[0.3855765,0.0578041,0.1314115,0.00457297,0.003575169,0.0004706015,0.001114745,0.0003284082,0.4151459],"genre_candidate":"methods","genre_consensus":null,"teacher_disagreement_score":0.01162971,"threshold_uncertainty_score":0.0389052,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.03475220941535977,"score_gpt":0.2765681388305936,"score_spread":0.2418159294152338,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}