{"id":"W2106326364","doi":"10.1109/35.965375","title":"MEMS optical switches","year":2001,"lang":"en","type":"article","venue":"IEEE Communications Magazine","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":139,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Toronto","funders":"","keywords":"Microelectromechanical systems; Optical switch; Scalability; Fabrication; Actuator; Surface micromachining; Computer science; Process (computing); Electronic engineering; Materials science; Nanotechnology; Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00005610007,0.0001047238,0.0001168405,0.00007418614,0.00008784993,0.0000174794,0.0006609905,0.00007315328,0.00002899807],"category_scores_gemma":[0.00003530952,0.0001028836,0.0000346846,0.0002625324,0.0001319955,0.0001212538,0.0001038772,0.0002405028,0.0003883603],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00003734108,"about_ca_system_score_gemma":0.000005500115,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000002058771,"about_ca_topic_score_gemma":0.00005863067,"domain_scores_codex":[0.9995075,0.000002312267,0.000160015,0.00008569755,0.00006413744,0.0001803665],"domain_scores_gemma":[0.9983823,0.00007238724,0.00001551437,0.001455299,0.0000335166,0.00004100012],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"not_applicable","study_design_scores_codex":[0.000005347396,0.0001217558,0.0002022773,0.00001826998,0.00004919786,0.00000698296,0.0000874698,0.002092546,0.8550747,0.007045659,0.0172382,0.1180576],"study_design_scores_gemma":[0.0002889923,0.00003140697,0.001944268,0.00002927737,0.00001717743,0.00004774314,0.00007866041,0.003603647,0.051923,0.005434858,0.9362888,0.0003122227],"study_design_candidate":"not_applicable","study_design_consensus":null,"genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.595465,0.007925681,0.04416801,0.005746924,0.0008875903,0.0004389595,0.0000128631,0.006625781,0.3387292],"genre_scores_gemma":[0.9633193,0.007620327,0.02799592,0.00004347399,0.00005099262,0.00006075643,0.00000988755,0.00002928533,0.0008700649],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.9190506,"threshold_uncertainty_score":0.4991715,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.03475220941535977,"score_gpt":0.2765681388305936,"score_spread":0.2418159294152338,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}