{"id":"W2107436850","doi":"10.1109/84.946793","title":"Fabrication of air-channel structures for microfluidic, microelectromechanical, and microelectronic applications","year":2001,"lang":"en","type":"article","venue":"Journal of Microelectromechanical Systems","topic":"Microfluidic and Capillary Electrophoresis Applications","field":"Engineering","cited_by":92,"is_retracted":false,"has_abstract":true,"ca_institutions":"Advanced Micro Devices (Canada)","funders":"National Science Foundation","keywords":"Microelectronics; Materials science; Fabrication; Microscale chemistry; Nanotechnology; Microelectromechanical systems; Polymer; Dielectric; Copper interconnect; Microfluidics; Electroplating; Photoresist; Photolithography; Lithography; Optoelectronics; Composite material","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0005957836,0.0004035032,0.000903956,0.0003940118,0.0001627406,0.00005312734,0.0005665742,0.0003108566,0.00001763176],"category_scores_gemma":[0.00004470729,0.0003826701,0.0003214027,0.0006587435,0.00008251645,0.0001541266,0.00003954829,0.0004621544,0.000004432796],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002916609,"about_ca_system_score_gemma":0.0001497516,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00001410912,"about_ca_topic_score_gemma":0.000001960729,"domain_scores_codex":[0.9970401,0.00008786683,0.001479821,0.000363555,0.0002957874,0.0007329038],"domain_scores_gemma":[0.9978926,0.0002119819,0.0005927275,0.0004146413,0.0006397437,0.0002482722],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00009899474,0.00009331945,0.000007396185,0.0002038402,0.0003021625,0.000001706606,0.00004314347,0.00002663516,0.967306,0.00664112,0.02326947,0.002006174],"study_design_scores_gemma":[0.001412992,0.001177502,0.00004365462,0.0000776555,0.0003085194,0.00175675,0.0001248759,0.0006959343,0.8123295,0.008792864,0.1727749,0.0005049137],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.2638171,0.2416504,0.4924967,0.0002065732,0.0002547428,0.001381541,0.00005700488,0.00009686728,0.00003908453],"genre_scores_gemma":[0.875655,0.1229475,0.0005535025,0.00005996421,0.0004201166,0.0001737001,0.00002920483,0.00009623117,0.00006481913],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.6118379,"threshold_uncertainty_score":0.9998625,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007840859374863075,"score_gpt":0.2159433732887225,"score_spread":0.2081025139138595,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}