{"id":"W2107853533","doi":"10.1109/tmtt.2010.2079092","title":"Vertical High-$Q$ RF-MEMS Devices for Reactive Lumped-Element Circuits","year":2010,"lang":"en","type":"article","venue":"IEEE Transactions on Microwave Theory and Techniques","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":12,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Saskatchewan","funders":"University of Saskatchewan","keywords":"Capacitor; Inductor; Materials science; Variable capacitor; Electronic circuit; Q factor; Capacitive sensing; Optoelectronics; Cantilever; Microelectromechanical systems; Integrated circuit; Band-pass filter; Photoresist; Electrical engineering; Engineering; Layer (electronics); Resonator; Voltage; Nanotechnology","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001902344,0.0003081993,0.0001563019,0.0001330191,0.0001448773,0.0005059285,0.0006227639,0.0003533213,0.004031419],"category_scores_gemma":[0.0003429289,0.0001969199,0.0001341166,0.000212665,0.0001974049,0.0004997012,0.000302334,0.0002955849,0.001231728],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005254178,"about_ca_system_score_gemma":0.0001282428,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002403711,"about_ca_topic_score_gemma":0.0009385116,"domain_scores_codex":[0.9998455,0.00001383245,0.000008366167,0.00003139918,0.00007935456,0.00002146558],"domain_scores_gemma":[0.9998595,0.00003942979,0.00003296261,0.00002298933,0.00003644331,0.000008598796],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00005913919,0.00001352337,0.0002146631,0.00008391213,0.000009988603,0.00003643762,0.00002987825,0.0005947025,0.9768677,0.009892199,0.000882474,0.01131532],"study_design_scores_gemma":[0.0000565807,0.0003809221,0.001123134,0.00002590989,0.00003313648,0.0003510093,0.00003238341,0.01981699,0.9358593,0.00291705,0.03937937,0.00002420299],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.4456905,0.004107135,0.5102586,0.00123702,0.0005052243,0.0001619166,0.001046382,0.002428061,0.03456527],"genre_scores_gemma":[0.7821848,0.0006913158,0.207659,0.0002551345,0.00008271639,0.00007525892,0.0003691875,0.0000833053,0.00859925],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.004031419,"threshold_uncertainty_score":0.01348644,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008397034820445936,"score_gpt":0.2407600079484271,"score_spread":0.2323629731279811,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}