{"id":"W2107853533","doi":"10.1109/tmtt.2010.2079092","title":"Vertical High-$Q$ RF-MEMS Devices for Reactive Lumped-Element Circuits","year":2010,"lang":"en","type":"article","venue":"IEEE Transactions on Microwave Theory and Techniques","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":12,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Saskatchewan","funders":"University of Saskatchewan","keywords":"Capacitor; Inductor; Materials science; Variable capacitor; Electronic circuit; Q factor; Capacitive sensing; Optoelectronics; Cantilever; Microelectromechanical systems; Integrated circuit; Band-pass filter; Photoresist; Electrical engineering; Engineering; Layer (electronics); Resonator; Voltage; Nanotechnology","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002253391,0.0002101026,0.0001943689,0.0001357079,0.0001597968,0.00002610222,0.0001243163,0.0002160273,0.00003405521],"category_scores_gemma":[0.000009259097,0.0001947944,0.00007071278,0.00008945235,0.0001584173,0.0001577971,0.000001883691,0.0004500787,0.00000425186],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0000314697,"about_ca_system_score_gemma":0.000008635277,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000004162789,"about_ca_topic_score_gemma":0.00006718482,"domain_scores_codex":[0.9992489,0.000006375237,0.0001826601,0.0002379768,0.00006487822,0.0002591758],"domain_scores_gemma":[0.999413,0.0002325102,0.00001421544,0.0002440789,0.00003924076,0.0000569197],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003768543,0.00004250574,3.054056e-7,0.00003118999,0.00003906442,0.000001419689,0.00005342137,0.000007902073,0.8291108,0.005163206,0.0000499757,0.1654625],"study_design_scores_gemma":[0.0001853396,0.0001641524,0.000006841585,0.00003219513,0.00004126169,0.00001424765,0.0001130388,0.00000774338,0.9586201,0.0357688,0.004816062,0.0002302005],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.5147611,0.00004083242,0.4830599,0.00003793665,0.0002407734,0.0003199041,0.00003420858,0.001034594,0.0004707765],"genre_scores_gemma":[0.9927984,0.0002212963,0.006444776,0.00006614457,0.00004515198,0.0003026164,0.000003150535,0.00004312205,0.00007527738],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.4780373,"threshold_uncertainty_score":0.7943485,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008397034820445936,"score_gpt":0.2407600079484271,"score_spread":0.2323629731279811,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}