{"id":"W2108673330","doi":"10.1109/asmc.2012.6212882","title":"Development of CMP pad using an unpatterned surface inspection system","year":2012,"lang":"en","type":"article","venue":"","topic":"Industrial Vision Systems and Defect Detection","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Dow Chemical (Canada)","funders":"","keywords":"Chemical-mechanical planarization; Blanket; Wafer; Copper interconnect; Haze; Materials science; Characterization (materials science); Process (computing); Lithography; Semiconductor device fabrication; Etching (microfabrication); Computer science; Nanotechnology; Optoelectronics; Layer (electronics); Chemistry; Composite material","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002593078,0.0002910813,0.0002711363,0.0003779611,0.0001625801,0.0002797625,0.000797678,0.0003446958,0.001854167],"category_scores_gemma":[0.0004190746,0.0002237594,0.0001557309,0.0001543607,0.0001717423,0.0005651418,0.0004839985,0.0002787099,0.0006614339],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001894363,"about_ca_system_score_gemma":0.0002625075,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0006048639,"about_ca_topic_score_gemma":0.0006249695,"domain_scores_codex":[0.9996227,0.00002697482,0.00001725124,0.0001236418,0.000183681,0.00002569996],"domain_scores_gemma":[0.9997308,0.00003573274,0.00003040353,0.00008066931,0.0000964404,0.00002603135],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000817168,0.00006637336,0.001618991,0.00007252007,0.000007928907,0.0001904577,0.00006453798,0.001101474,0.9178246,0.0004477075,0.0007438162,0.0777799],"study_design_scores_gemma":[0.00004838131,0.001487513,0.01820262,0.00001702702,0.00002801469,0.001444821,0.00005936854,0.09034841,0.8774991,0.0002515687,0.01056594,0.00004715018],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"methods","genre_scores_codex":[0.3187778,0.0002637327,0.6652132,0.0001692541,0.0001343154,0.0004266324,0.0003732481,0.009205501,0.00543636],"genre_scores_gemma":[0.5819883,0.0001237956,0.4129472,0.00007980245,0.00002422689,0.0001852916,0.000231285,0.0001329752,0.004287011],"genre_candidate":"methods","genre_consensus":"methods","teacher_disagreement_score":0.001854167,"threshold_uncertainty_score":0.006202877,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.06267991958895137,"score_gpt":0.2596987892041377,"score_spread":0.1970188696151864,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}