{"id":"W2108673330","doi":"10.1109/asmc.2012.6212882","title":"Development of CMP pad using an unpatterned surface inspection system","year":2012,"lang":"en","type":"article","venue":"","topic":"Industrial Vision Systems and Defect Detection","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Dow Chemical (Canada)","funders":"","keywords":"Chemical-mechanical planarization; Blanket; Wafer; Copper interconnect; Haze; Materials science; Characterization (materials science); Process (computing); Lithography; Semiconductor device fabrication; Etching (microfabrication); Computer science; Nanotechnology; Optoelectronics; Layer (electronics); Chemistry; Composite material","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003293799,0.00008932447,0.0001389761,0.0000632173,0.00006275222,0.00001346364,0.00003368006,0.00009377327,0.00001594349],"category_scores_gemma":[0.000002671418,0.00007955164,0.00002548463,0.0001466886,0.000004369223,0.0002292571,0.00000928331,0.0000605783,0.00002923949],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001939142,"about_ca_system_score_gemma":0.00001208277,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001190283,"about_ca_topic_score_gemma":0.00001272184,"domain_scores_codex":[0.999312,0.00002870033,0.0002931636,0.00007094709,0.0001355859,0.0001596199],"domain_scores_gemma":[0.9997345,0.00000810656,0.00004394902,0.0001142344,0.00003388363,0.00006531231],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003001495,0.0001020993,0.01388313,0.0005035557,0.0001202245,0.000001133948,0.006889521,0.0505497,0.9176319,0.000427488,0.0001948686,0.009666349],"study_design_scores_gemma":[0.0005217325,0.00003734563,0.005706285,0.0001615129,0.00001861352,0.00003558857,0.004290449,0.1474668,0.8384115,5.751688e-7,0.003003972,0.0003456768],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9221158,0.00002750588,0.07434711,2.946227e-7,0.001242494,0.0001096906,8.493949e-7,0.0005500465,0.001606187],"genre_scores_gemma":[0.9962125,3.115572e-7,0.003563809,0.000001205136,0.000179174,0.000001943907,0.000001584191,0.0000180894,0.00002139178],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.09691709,"threshold_uncertainty_score":0.3244022,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.06267991958895137,"score_gpt":0.2596987892041377,"score_spread":0.1970188696151864,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}