{"id":"W2109130690","doi":"10.1109/icmens.2005.43","title":"Dynamic Deflection of Electrostatic MEMS","year":2006,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of British Columbia","funders":"","keywords":"Microelectromechanical systems; Deflection (physics); Touchdown; Instability; Dielectric; Materials science; Voltage; Nonlinear system; Mechanics; Electrostatics; Membrane; Optics; Optoelectronics; Engineering; Electrical engineering; Physics; Chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00008711594,0.0002450693,0.0002156733,0.00009977473,0.0002539895,0.0004082768,0.0002781784,0.0004876502,0.001031464],"category_scores_gemma":[0.000245794,0.0001275443,0.0001723279,0.00006972095,0.0005912255,0.0003994108,0.0003348639,0.0002638627,0.0001487494],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004250489,"about_ca_system_score_gemma":0.0001575922,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000548719,"about_ca_topic_score_gemma":0.0002553003,"domain_scores_codex":[0.9999287,0.00001210294,0.000002067084,0.00001547091,0.00002819989,0.00001348963],"domain_scores_gemma":[0.9999541,0.00001993053,0.000006791481,0.000006255317,0.000006980939,0.000005864938],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.0001882349,0.00005431023,0.001088159,0.0001558684,0.00003299936,0.001015609,0.000232011,0.3800752,0.4929141,0.1043992,0.0008156474,0.01902854],"study_design_scores_gemma":[0.00001361929,0.00006659105,0.0006995207,0.000008035084,0.000005270069,0.0002215905,0.00003906902,0.9679033,0.0182099,0.009731826,0.003080242,0.00002103788],"study_design_candidate":"simulation_or_modeling","study_design_consensus":null,"genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.6633398,0.001754431,0.3051579,0.0005218163,0.0002031031,0.00006122778,0.0001017694,0.0002327912,0.02862729],"genre_scores_gemma":[0.9899525,0.0004011208,0.005764165,0.00004322757,0.00002292897,0.00002135803,0.0000257503,0.00001182796,0.003757106],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001031464,"threshold_uncertainty_score":0.003450572,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.002361576306453381,"score_gpt":0.1989933099882059,"score_spread":0.1966317336817526,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}