{"id":"W2109423059","doi":"10.1109/mnrc.2008.4683382","title":"A CMOS-MEMS scanning probe microscope with integrated position sensors","year":2008,"lang":"en","type":"article","venue":"","topic":"Force Microscopy Techniques and Applications","field":"Physics and Astronomy","cited_by":7,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Piezoresistive effect; Microelectromechanical systems; Materials science; Actuator; Cantilever; CMOS; Optoelectronics; Scanning probe microscopy; Chip; Microscope; Plane (geometry); Optics; Electrical engineering; Engineering; Physics; Composite material","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00003002921,0.0001349205,0.0001164028,0.00003813918,0.0002404031,0.0000353101,0.00009064388,0.00002733908,0.0004313317],"category_scores_gemma":[3.378298e-7,0.000101029,0.00004117615,0.0002309026,0.00008710302,0.00009256322,0.00002093912,0.0001212357,0.00006149571],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00002356727,"about_ca_system_score_gemma":0.00005498943,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0008621599,"about_ca_topic_score_gemma":0.000004281367,"domain_scores_codex":[0.999383,0.000007609485,0.0001339011,0.0002125884,0.00006727548,0.0001956399],"domain_scores_gemma":[0.9996182,0.000006597907,0.00005554248,0.0001881551,0.00007613489,0.00005533359],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000564649,0.0003625225,0.03919555,0.00001220387,0.0000832552,0.000006617711,0.0007582491,0.000140274,0.8974417,0.02966285,0.02963171,0.002648546],"study_design_scores_gemma":[0.0005685215,0.0002007024,0.001669958,0.00009504973,0.0000268417,0.00003999183,0.0006323872,0.0006973589,0.9631915,0.0007355453,0.03168327,0.0004588366],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7907999,0.000008156859,0.1830799,0.0001948183,0.00001622529,0.0003665337,0.00002685668,0.0001931568,0.02531443],"genre_scores_gemma":[0.9490698,0.000001486287,0.04385935,0.00008297154,0.00004751116,0.00009612522,0.0001256015,0.00002229373,0.006694853],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.1582699,"threshold_uncertainty_score":0.4722779,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008008588175543266,"score_gpt":0.2431055826983568,"score_spread":0.2350969945228135,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}