{"id":"W2110160823","doi":"10.1109/eit.2009.5189606","title":"A Highly accurate method to calculate capacitance of MEMS sensors with circular membranes","year":2009,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":11,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Windsor","funders":"","keywords":"Deflection (physics); Capacitance; Capacitive sensing; Materials science; Microelectromechanical systems; Membrane; Voltage; Residual stress; Finite element method; Nonlinear system; Mechanics; Structural engineering; Optics; Physics; Optoelectronics; Composite material; Engineering; Electrical engineering; Chemistry; Electrode","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00007409306,0.0001687591,0.0002688575,0.0001040708,0.00002411307,0.000008615429,0.000134585,0.00007883848,0.00001126935],"category_scores_gemma":[0.00001845737,0.0001263932,0.00004030231,0.0003570264,0.00002528945,0.0001182726,0.000007222886,0.0001075016,0.000008646399],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00002497775,"about_ca_system_score_gemma":0.000005324012,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00002016748,"about_ca_topic_score_gemma":0.00001195103,"domain_scores_codex":[0.9992626,0.000003698045,0.0001788888,0.0001788885,0.000125025,0.0002509497],"domain_scores_gemma":[0.9995384,0.00003066254,0.00002703147,0.0002995706,0.00004618789,0.00005813015],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000009958857,0.00000725971,0.000003126397,0.00003686662,0.00002640124,0.00001619018,0.0001050041,0.1250758,0.8677737,0.001246665,0.00006199149,0.00563709],"study_design_scores_gemma":[0.0001954719,0.00009519113,0.0003084803,0.00003890684,0.00001261513,0.00001753389,0.0001509335,0.001658479,0.9928561,0.0009367947,0.003506873,0.0002225469],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8119729,0.000269488,0.1831103,0.0002587705,0.00004725509,0.0001966187,0.000004656673,0.0009234532,0.003216637],"genre_scores_gemma":[0.8685437,0.00006811562,0.1311048,0.00006276007,0.00001241999,0.000008136626,6.90278e-7,0.00001940524,0.0001799646],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.1250825,"threshold_uncertainty_score":0.5154166,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01213477934795652,"score_gpt":0.2500129713860746,"score_spread":0.2378781920381181,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}