{"id":"W2110382391","doi":"10.1557/proc-677-aa4.21","title":"Structural and vibrational properties of silicon dioxide thin films densified by medium-energy particles bombardment","year":2001,"lang":"en","type":"article","venue":"MRS Proceedings","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":false,"ca_institutions":"Polytechnique Montréal; Université de Montréal","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Materials science; Silicon dioxide; Substrate (aquarium); Kinetic energy; Silicon; Amorphous solid; Diffraction; Range (aeronautics); Ion; Crystalline silicon; Optics; Crystallography; Optoelectronics; Composite material","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00006836664,0.0001605213,0.0001446964,0.0002610937,0.0002486999,0.000205496,0.0002507138,0.0002603651,0.001890888],"category_scores_gemma":[0.0002145751,0.0001953233,0.0001142423,0.0001760569,0.0003228401,0.0001581802,0.0001149641,0.0002492031,0.0001487261],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002467471,"about_ca_system_score_gemma":0.0001137608,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.004263339,"about_ca_topic_score_gemma":0.003879472,"domain_scores_codex":[0.9999371,0.000002662026,0.000002474013,0.00001359863,0.00002685402,0.0000174112],"domain_scores_gemma":[0.9999044,0.0000332538,0.00001653817,0.00000763661,0.00002464364,0.00001345261],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000123948,0.000009924004,0.0006068933,0.00001943328,0.000007361388,0.00006163562,0.00004886112,0.0002396137,0.9982283,0.00008570848,0.00006092788,0.0005073819],"study_design_scores_gemma":[0.00001592072,0.000161886,0.02048822,0.000004346601,0.00001867362,0.000100986,0.0001792431,0.003133653,0.9753015,0.00004212446,0.000545046,0.000008295762],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9988589,0.0001551449,0.0001631403,0.00002118103,0.000005368329,0.000001788833,0.0000714042,0.000009888475,0.0007131071],"genre_scores_gemma":[0.9988109,0.00007837205,0.00013554,0.000009484454,0.00000244747,0.000002820766,0.0001625802,0.000005355451,0.0007924145],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.004263339,"threshold_uncertainty_score":0.008477032,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01537432732105334,"score_gpt":0.1913895041518259,"score_spread":0.1760151768307726,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}