{"id":"W2110417421","doi":"10.1088/0960-1317/16/3/002","title":"Fuse-tethers in MEMS","year":2006,"lang":"en","type":"article","venue":"Journal of Micromechanics and Microengineering","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":17,"is_retracted":false,"has_abstract":true,"ca_institutions":"Simon Fraser University","funders":"","keywords":"Joule heating; Fuse (electrical); Joule effect; Microelectromechanical systems; Fabrication; Substrate (aquarium); Reliability (semiconductor); Materials science; Electric heating; Process (computing); Joule (programming language); Silicon; Mechanical engineering; Structural engineering; Engineering; Composite material; Electrical engineering; Optoelectronics; Computer science; Physics; Power (physics)","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001159794,0.0001252467,0.0002110058,0.0002602694,0.00001355884,0.00001828743,0.0001039212,0.00007742122,0.000003798595],"category_scores_gemma":[0.000007702351,0.0001191855,0.00004555913,0.000144674,0.000009826764,0.0001189022,0.00002263445,0.0002551494,8.387831e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00005496087,"about_ca_system_score_gemma":0.000005089619,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00000554271,"about_ca_topic_score_gemma":0.00000862634,"domain_scores_codex":[0.9993641,0.000001154367,0.0003060772,0.00006708004,0.00005615599,0.0002054361],"domain_scores_gemma":[0.9998056,0.00001695396,0.00004956079,0.00007489715,0.00002265137,0.0000303761],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000002554516,0.000008465601,0.0000116065,0.00003144956,0.00000976519,0.00003732593,0.0000310465,0.008728356,0.9871567,0.0002879647,0.0001746433,0.003520054],"study_design_scores_gemma":[0.0009829906,0.00008516672,0.0003911036,0.0002387359,0.00001675229,0.0005285794,0.0003137771,0.003294176,0.9695872,0.003475312,0.02074281,0.0003434033],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9816055,0.007841883,0.01002759,0.00002871726,0.0003072486,0.00004145034,0.000001969971,0.00007357525,0.00007204076],"genre_scores_gemma":[0.9903931,0.002217468,0.007266415,0.000006585058,0.00006364833,0.0000011348,3.557313e-7,0.00003136523,0.00001994221],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.02056817,"threshold_uncertainty_score":0.4860244,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.002080064185312196,"score_gpt":0.1550979338388049,"score_spread":0.1530178696534926,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}