{"id":"W2110417421","doi":"10.1088/0960-1317/16/3/002","title":"Fuse-tethers in MEMS","year":2006,"lang":"en","type":"article","venue":"Journal of Micromechanics and Microengineering","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":17,"is_retracted":false,"has_abstract":true,"ca_institutions":"Simon Fraser University","funders":"","keywords":"Joule heating; Fuse (electrical); Joule effect; Microelectromechanical systems; Fabrication; Substrate (aquarium); Reliability (semiconductor); Materials science; Electric heating; Process (computing); Joule (programming language); Silicon; Mechanical engineering; Structural engineering; Engineering; Composite material; Electrical engineering; Optoelectronics; Computer science; Physics; Power (physics)","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002240241,0.0003073818,0.0002797537,0.00032994,0.0002860383,0.0002556374,0.0003119403,0.000760601,0.002240496],"category_scores_gemma":[0.0004976591,0.0002647581,0.000255192,0.000278136,0.0003832493,0.0006795164,0.000339068,0.0004818724,0.0005803248],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000320757,"about_ca_system_score_gemma":0.00009978329,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003749111,"about_ca_topic_score_gemma":0.0007019105,"domain_scores_codex":[0.9997604,0.00003666072,0.000009783864,0.0000369092,0.0001345085,0.00002163408],"domain_scores_gemma":[0.9998176,0.00007568734,0.00004411348,0.00003190815,0.00002144014,0.000009358701],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001791255,0.00006863567,0.00114349,0.0003729397,0.00004031859,0.00065086,0.0003324965,0.03287627,0.8007964,0.02844259,0.00193486,0.133162],"study_design_scores_gemma":[0.00004253909,0.0017875,0.006115523,0.0001158498,0.00006274998,0.003322259,0.0001398785,0.1511542,0.7203947,0.01393495,0.1028423,0.00008764698],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.532128,0.03415318,0.3849263,0.0008292845,0.00103948,0.0001949127,0.0002121144,0.002330242,0.04418647],"genre_scores_gemma":[0.9233721,0.004519885,0.05477528,0.0001365223,0.0001581679,0.0000586843,0.00008535251,0.00008744661,0.0168065],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002240496,"threshold_uncertainty_score":0.007495224,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.002080064185312196,"score_gpt":0.1550979338388049,"score_spread":0.1530178696534926,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}