{"id":"W2110891573","doi":"10.3390/s7123071","title":"Three Cavity Tunable MEMS Fabry Perot Interferometer","year":2007,"lang":"en","type":"article","venue":"Sensors","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":6,"is_retracted":false,"has_abstract":true,"ca_institutions":"Concordia University","funders":"","keywords":"Fabry–Pérot interferometer; Interferometry; Optics; Microelectromechanical systems; Ranging; Range (aeronautics); Physics; Materials science; Optoelectronics; Computer science; Telecommunications; Wavelength","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001061854,0.0001346686,0.0001398505,0.000099399,0.00004038337,0.00001217997,0.0001207769,0.0001165774,0.00004953858],"category_scores_gemma":[0.00003109863,0.0001222825,0.00004844425,0.0001483406,0.00005166151,0.00007332602,0.00004101974,0.0002273084,0.00009649225],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00005843087,"about_ca_system_score_gemma":0.000002223117,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00003324105,"about_ca_topic_score_gemma":0.0001650483,"domain_scores_codex":[0.9992863,8.268589e-7,0.0001413058,0.0001424159,0.0000884661,0.0003407187],"domain_scores_gemma":[0.9996206,0.00003288589,0.00001460767,0.00026487,0.0000183347,0.00004870792],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003752406,0.00004761944,0.001399614,0.0001116628,0.0001070208,0.0001764651,0.0004966852,0.005135279,0.6361052,0.001026606,0.00338112,0.3519752],"study_design_scores_gemma":[0.0005212196,0.0001394114,0.009256099,0.00006529502,0.00002151189,0.00005206608,0.0008063153,0.004027478,0.9202761,0.007314221,0.0567101,0.000810149],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9695331,0.00014843,0.02236339,0.00002917655,0.00036486,0.00008977192,0.000003131828,0.001044123,0.00642394],"genre_scores_gemma":[0.9956944,0.00004344353,0.003740214,0.00001855605,0.00006654507,0.000003889077,0.000001400098,0.0000310082,0.000400533],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.351165,"threshold_uncertainty_score":0.4986536,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01327760607952782,"score_gpt":0.2271322012677752,"score_spread":0.2138545951882474,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}