{"id":"W2110891573","doi":"10.3390/s7123071","title":"Three Cavity Tunable MEMS Fabry Perot Interferometer","year":2007,"lang":"en","type":"article","venue":"Sensors","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":6,"is_retracted":false,"has_abstract":true,"ca_institutions":"Concordia University","funders":"","keywords":"Fabry–Pérot interferometer; Interferometry; Optics; Microelectromechanical systems; Ranging; Range (aeronautics); Physics; Materials science; Optoelectronics; Computer science; Telecommunications; Wavelength","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004010581,0.0005248322,0.0006401449,0.0004278494,0.0004168657,0.0004764786,0.001392459,0.0008346913,0.001240237],"category_scores_gemma":[0.0004580124,0.0002766692,0.0005397327,0.0002228606,0.0005753869,0.0007024826,0.0007253516,0.0005828378,0.0004520305],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0009514482,"about_ca_system_score_gemma":0.0004291964,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000542919,"about_ca_topic_score_gemma":0.0006344815,"domain_scores_codex":[0.9992484,0.00007415471,0.00002148081,0.0001622757,0.000418177,0.00007544218],"domain_scores_gemma":[0.9996953,0.00007279147,0.00006389993,0.00006884007,0.00006749262,0.00003172312],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0003089359,0.00006822059,0.001188689,0.0001310293,0.00004838008,0.0002790655,0.0001035195,0.004717333,0.9324456,0.02177136,0.0008291526,0.03810875],"study_design_scores_gemma":[0.00007496966,0.0004066709,0.002348934,0.00001996008,0.00006173502,0.001105346,0.00004207173,0.1268163,0.84973,0.004151055,0.01510179,0.0001412947],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.4316775,0.002001028,0.5484331,0.0006851544,0.0005408634,0.0001910057,0.0003267584,0.002055502,0.0140891],"genre_scores_gemma":[0.8068702,0.0003255062,0.1881191,0.0001123195,0.00006090935,0.0000940637,0.00008494253,0.0000235356,0.004309488],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.001392459,"threshold_uncertainty_score":0.006903291,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01327760607952782,"score_gpt":0.2271322012677752,"score_spread":0.2138545951882474,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}