{"id":"W2111135224","doi":"10.1109/ccece.1999.804969","title":"Elastic properties and vibration of micro-machined structures subject to residual stresses","year":2003,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":22,"is_retracted":false,"has_abstract":true,"ca_institutions":"Dalhousie University","funders":"","keywords":"Residual stress; Materials science; Vibration; Finite element method; Square (algebra); Modulus; Structural engineering; Residual; Composite material; Elastic modulus; Young's modulus; Stress (linguistics); Strain (injury); Acoustics; Engineering; Physics; Mathematics; Geometry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00001878294,0.00007974776,0.00009510628,0.00006311465,0.00002261639,0.00001054895,0.00003837998,0.00003997326,0.00001401611],"category_scores_gemma":[0.00009599287,0.00005817362,0.000007905522,0.00007487897,0.00002768049,0.00007090993,0.00001352522,0.00004698584,8.856146e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00000675359,"about_ca_system_score_gemma":0.000005295374,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00001183392,"about_ca_topic_score_gemma":0.000068956,"domain_scores_codex":[0.9996774,0.00000279859,0.00009894604,0.00008073895,0.00004560867,0.00009450594],"domain_scores_gemma":[0.9998468,0.00001930178,0.00001023638,0.0000899014,0.00001541602,0.00001836566],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000006256155,0.000002805461,0.0001264732,0.00005107865,0.000008490233,4.302865e-7,0.00008237442,0.004732591,0.9915763,0.001672421,0.0001039727,0.00163688],"study_design_scores_gemma":[0.00008788482,0.00005080943,0.002047537,0.00001586201,0.0000039264,0.000002500376,0.0001940903,0.00005913532,0.995805,0.001332532,0.0003195771,0.00008114493],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9940929,0.0006287767,0.004183792,0.00002157033,0.00004794568,0.00009992268,0.000003143621,0.000224957,0.0006970344],"genre_scores_gemma":[0.9838329,0.00007430299,0.0159924,0.000008720131,0.000006943026,0.000005760605,6.87616e-7,0.00001047027,0.00006782683],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.01180861,"threshold_uncertainty_score":0.2372252,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01257098114731091,"score_gpt":0.2051058970213923,"score_spread":0.1925349158740814,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}