{"id":"W2111698490","doi":"10.1016/j.sna.2013.05.026","title":"A novel and low-cost multi-stage approach for the fabrication of silicon nano-structures","year":2013,"lang":"en","type":"article","venue":"Sensors and Actuators A Physical","topic":"Silicon Nanostructures and Photoluminescence","field":"Materials Science","cited_by":5,"is_retracted":false,"has_abstract":false,"ca_institutions":"Concordia University","funders":"Natural Sciences and Engineering Research Council of Canada; Concordia University","keywords":"Fabrication; Wafer; Materials science; Etching (microfabrication); Silicon; Nano-; Pyramid (geometry); Nanotechnology; Isotropic etching; Optoelectronics; Dry etching; Composite material; Optics; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00007311611,0.0001595596,0.0002269946,0.00002483253,0.000151021,0.00008300556,0.0001386507,0.00005754133,0.00002361539],"category_scores_gemma":[0.00009077707,0.00009505625,0.00005723387,0.00008162531,0.0002991621,0.0001203452,0.00005519222,0.00006619143,0.000001499668],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00000646093,"about_ca_system_score_gemma":0.00001572128,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00035038,"about_ca_topic_score_gemma":0.000002966203,"domain_scores_codex":[0.9991709,0.00002101931,0.0001658295,0.0003047643,0.0001324046,0.0002051003],"domain_scores_gemma":[0.9992617,0.00022869,0.0001229383,0.0002218021,0.00008657984,0.00007831552],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002423804,0.00006083415,0.0003441619,0.00006351923,0.000006831326,5.138672e-8,0.000752253,0.0000296459,0.9936668,0.0009683415,0.00008141831,0.004001901],"study_design_scores_gemma":[0.0009242289,0.00006888562,0.03806822,0.00001352906,0.00003751344,0.000008827154,0.0006945302,0.1006057,0.8587599,0.0003682804,0.0002040842,0.0002462333],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9968455,0.000047905,0.002052711,0.00006036126,0.00007700387,0.0007930191,0.00009522219,0.00001692097,0.00001139942],"genre_scores_gemma":[0.9982164,0.00001024674,0.001427176,0.00007964091,0.0001187594,0.00007058428,0.000007585021,0.00001356306,0.00005606304],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.1349069,"threshold_uncertainty_score":0.3876281,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02258588103645591,"score_gpt":0.2632459801935608,"score_spread":0.2406600991571049,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}