{"id":"W2112346297","doi":"10.1109/ccece.1996.548044","title":"Magnetically actuated CMOS micromachined cantilever-in-cantilever devices","year":2002,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta","funders":"","keywords":"Cantilever; Deflection (physics); CMOS; Surface micromachining; Materials science; Lorentz force; Optoelectronics; Acoustics; Physics; Optics; Fabrication; Magnetic field; Composite material","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001204063,0.0002507819,0.0002556637,0.0001224415,0.000257609,0.0003182209,0.0007994096,0.0005359006,0.001604273],"category_scores_gemma":[0.0003003674,0.0002344785,0.0001268594,0.0001147246,0.0002188906,0.0002776035,0.0003200998,0.0005554489,0.0006241989],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003570979,"about_ca_system_score_gemma":0.0002598832,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0005002102,"about_ca_topic_score_gemma":0.001701992,"domain_scores_codex":[0.9997565,0.00001348118,0.00001650527,0.00006287298,0.0001219388,0.00002873702],"domain_scores_gemma":[0.9998543,0.00002989211,0.00002922417,0.00001802333,0.00004671737,0.00002177658],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002736043,0.00000825808,0.00006798931,0.00004564294,0.000002691566,0.00005078283,0.00001491311,0.0002078664,0.9952247,0.0005267508,0.0002927785,0.003530035],"study_design_scores_gemma":[0.00003599896,0.0001303672,0.001124606,0.000008572597,0.00001278417,0.0003651354,0.00001992554,0.006241661,0.9780422,0.0002832456,0.01370783,0.00002762569],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7172202,0.005225611,0.2491703,0.001155174,0.002110313,0.0004900303,0.002373175,0.003495235,0.01875999],"genre_scores_gemma":[0.7053405,0.001191627,0.2818465,0.0003639526,0.0001360706,0.0002832598,0.0005166075,0.00008195914,0.01023968],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001604273,"threshold_uncertainty_score":0.005366802,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009562853954304494,"score_gpt":0.1820134178520648,"score_spread":0.1724505638977603,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}