{"id":"W2112672449","doi":"10.1149/06103.0003ecst","title":"(Invited) Spatial ALD, Deposition of Al<sub>2</sub>O<sub>3</sub> Films at Throughputs Exceeding 3000 Wafers per Hour","year":2014,"lang":"en","type":"article","venue":"ECS Transactions","topic":"Silicon and Solar Cell Technologies","field":"Engineering","cited_by":13,"is_retracted":false,"has_abstract":true,"ca_institutions":"Cégep de Lévis","funders":"Agentschap NL","keywords":"Passivation; Wafer; Materials science; Deposition (geology); Carrier lifetime; Atomic layer deposition; Annealing (glass); Thermal stability; Optoelectronics; Thin film; Analytical Chemistry (journal); Nanotechnology; Chemical engineering; Silicon; Composite material; Chemistry; Layer (electronics); Environmental chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0001287584,0.0002985384,0.0003187179,0.0002368806,0.0002522951,0.00004087966,0.0001911891,0.0003188287,0.00005517076],"category_scores_gemma":[0.00001844774,0.0003279483,0.0002332238,0.0002798594,0.0001148651,0.0002788193,0.00001383558,0.000425606,0.00008658093],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001312008,"about_ca_system_score_gemma":0.000009346438,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00003809573,"about_ca_topic_score_gemma":0.0002313485,"domain_scores_codex":[0.9985939,0.0000344293,0.0003730426,0.0003171358,0.0002662633,0.0004152793],"domain_scores_gemma":[0.9993391,0.00009293052,0.00006132936,0.0003578111,0.00004772297,0.0001010919],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001422353,0.00004784266,0.0001908705,0.0000620066,0.00008927748,0.000002724256,0.000446128,0.02043189,0.9580334,0.00002420144,0.001045282,0.01961217],"study_design_scores_gemma":[0.0004992004,0.00007640763,0.002915765,0.00005609822,0.00008320707,0.0000240498,0.0002487541,0.04116136,0.9535372,0.00005943789,0.00100323,0.0003353368],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.811609,0.0001208702,0.1857971,0.0003657378,0.0005843938,0.0001855154,0.00003151036,0.0008862723,0.000419586],"genre_scores_gemma":[0.9981344,0.0006137923,0.0008627148,0.0001601415,0.00006769253,0.00005114744,0.00002708975,0.00007683547,0.000006217417],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.1865253,"threshold_uncertainty_score":0.9999173,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008279249812119891,"score_gpt":0.191784992181976,"score_spread":0.1835057423698561,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}