{"id":"W2115366588","doi":"10.1186/1556-276x-8-139","title":"SML resist processing for high-aspect-ratio and high-sensitivity electron beam lithography","year":2013,"lang":"en","type":"article","venue":"Nanoscale Research Letters","topic":"Advancements in Photolithography Techniques","field":"Engineering","cited_by":19,"is_retracted":false,"has_abstract":true,"ca_institutions":"National Institute for Nanotechnology; University of Alberta","funders":"Alberta Innovates; Natural Sciences and Engineering Research Council of Canada; University of Manchester; University of Alberta","keywords":"Resist; Materials science; Methyl isobutyl ketone; Electron-beam lithography; Lithography; Xylene; Nanolithography; Isopropyl alcohol; Nanotechnology; Optoelectronics; Toluene; Ketone; Fabrication; Organic chemistry; Chemistry","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0008052036,0.0002658575,0.0002895482,0.0006063928,0.0004000503,0.0002392201,0.0002056993,0.0001367174,0.00001453762],"category_scores_gemma":[0.00007745558,0.0002671362,0.00007627039,0.0007838634,0.0003761863,0.0005578022,0.00007707626,0.0005455886,0.000006787288],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001420977,"about_ca_system_score_gemma":0.0000220434,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002338126,"about_ca_topic_score_gemma":0.00003332064,"domain_scores_codex":[0.9974895,0.0001342818,0.0002919703,0.0004939513,0.0005713138,0.001019055],"domain_scores_gemma":[0.9988442,0.0003217687,0.00004103777,0.0003934912,0.0002262486,0.0001732451],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003197349,0.00004776187,0.001406005,0.0003075336,0.00005361189,0.00000821194,0.00007578879,0.00003287438,0.9598969,0.0006640705,0.01731523,0.02016008],"study_design_scores_gemma":[0.0008994634,0.0003651831,0.02976921,0.0002235373,0.00002773871,0.00001259099,0.00005737046,0.003755609,0.9490578,0.007819962,0.007222692,0.0007888025],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9092372,0.0008898838,0.08472751,0.001641157,0.0001173626,0.002124633,0.00003616124,0.0008260927,0.0003999803],"genre_scores_gemma":[0.9713814,0.000247292,0.02679805,0.0001879355,0.0001778528,0.001044216,0.00002681071,0.00008716084,0.00004929779],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.06214416,"threshold_uncertainty_score":0.9999781,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01409903777090454,"score_gpt":0.2883530831968311,"score_spread":0.2742540454259266,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}