{"id":"W2115543310","doi":"10.1109/icra.2013.6630759","title":"Automated nanoprobing under scanning electron microscopy","year":2013,"lang":"en","type":"article","venue":"","topic":"Integrated Circuits and Semiconductor Failure Analysis","field":"Engineering","cited_by":5,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Toronto","funders":"","keywords":"Metrology; Materials science; Scanning electron microscope; Chip; Computer science; Microscope; Optics; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["insufficient_payload"],"consensus_categories":[],"category_scores_codex":[0.00004535543,0.0001565151,0.0001588102,0.0001230393,0.00006418433,0.000127267,0.0001172384,0.00009169984,0.001336301],"category_scores_gemma":[0.00000346107,0.0001299831,0.00006335934,0.0003000823,0.00001501859,0.000236067,0.000007366219,0.000159125,0.0006674493],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00009563901,"about_ca_system_score_gemma":0.00001457221,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004119307,"about_ca_topic_score_gemma":0.0000285544,"domain_scores_codex":[0.9992079,0.000009938601,0.0001849692,0.0001468685,0.00008469516,0.0003656942],"domain_scores_gemma":[0.999681,0.00001173989,0.0000156672,0.0001621211,0.00006660467,0.00006285733],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[1.922601e-7,0.000004193369,0.00005510151,0.000007208401,0.00008596435,8.094812e-7,0.00007720219,0.006625704,0.9730899,0.000729359,0.0190997,0.0002246769],"study_design_scores_gemma":[0.0001334811,0.00001722058,0.0002147263,0.00002438244,0.00003366455,0.00001038688,0.0003167168,0.2668282,0.7302641,0.0002877175,0.001546117,0.0003233743],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9665245,0.0002384308,0.002448619,0.00007359947,0.0001508798,0.0001077595,7.488953e-7,0.00245828,0.02799719],"genre_scores_gemma":[0.9974148,0.000009980528,0.0006821495,0.0001449738,0.00003744804,0.00001795323,0.00001369024,0.00003783969,0.001641114],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.2602025,"threshold_uncertainty_score":0.9995766,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006388731156896212,"score_gpt":0.22279045298208,"score_spread":0.2164017218251838,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}