{"id":"W2116892860","doi":"10.1557/proc-617-j3.3","title":"Ablation-Induced Stresses in Fused Silica by 157-nm F<sub>2</sub>-Laser irradiation","year":2000,"lang":"en","type":"article","venue":"MRS Proceedings","topic":"Advanced Surface Polishing Techniques","field":"Engineering","cited_by":10,"is_retracted":false,"has_abstract":false,"ca_institutions":"University of Toronto","funders":"","keywords":"Materials science; Residual stress; Fluence; Ultimate tensile strength; Composite material; Laser ablation; Irradiation; Laser; Optical microscope; Etching (microfabrication); Microstructure; Ablation; Substrate (aquarium); Layer (electronics); Optics; Scanning electron microscope","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001302938,0.0002199674,0.0002822412,0.000162625,0.0003876178,0.0002235176,0.0002140742,0.0003019123,0.001310832],"category_scores_gemma":[0.0002059848,0.0001936839,0.0002197855,0.0001123128,0.0003670016,0.0002418788,0.0002364212,0.0002545344,0.0002079215],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005265413,"about_ca_system_score_gemma":0.0004478767,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.002821805,"about_ca_topic_score_gemma":0.003810436,"domain_scores_codex":[0.9999059,0.000004362276,0.000004212809,0.00001832409,0.0000324156,0.00003482233],"domain_scores_gemma":[0.9998916,0.00003165264,0.00003266301,0.000009087004,0.00002305682,0.00001193329],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00007228988,0.000007434583,0.0002961074,0.00002397181,0.000004335371,0.00004418925,0.00007085281,0.0002415364,0.9983192,0.0001024865,0.00004624603,0.0007714231],"study_design_scores_gemma":[0.00001617588,0.0001171514,0.008453258,0.000005655826,0.000008633348,0.00007439909,0.00005933152,0.001571728,0.9886594,0.00007253335,0.0009524005,0.000009391531],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.996986,0.0003612329,0.0008969839,0.00003618513,0.0000172542,0.00001195684,0.00006131553,0.00003930298,0.001589883],"genre_scores_gemma":[0.9980682,0.0001365836,0.0005051712,0.00001545339,0.000007269375,0.000008621506,0.000058616,0.00001558719,0.001184518],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002821805,"threshold_uncertainty_score":0.005610764,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006356354078297547,"score_gpt":0.2076606414744484,"score_spread":0.2013042873961509,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}