{"id":"W2116986666","doi":"10.1116/1.1627334","title":"Investigation of substrate rotation at glancing incidence on thin-film morphology","year":2003,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena","topic":"Optical Coatings and Gratings","field":"Materials Science","cited_by":59,"is_retracted":false,"has_abstract":true,"ca_institutions":"Carleton University; University of Alberta","funders":"","keywords":"Materials science; Rotation (mathematics); Substrate (aquarium); Microstructure; Silicon; Morphology (biology); Evaporation; Thin film; Optics; Aluminium; Limiting; Rotational speed; Crystallography; Composite material; Optoelectronics; Nanotechnology; Geometry; Chemistry; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.002265965,0.0001787695,0.0003151211,0.0005787413,0.000446702,0.0001193375,0.0002828282,0.00009774953,0.00001029895],"category_scores_gemma":[0.000262386,0.0001326706,0.00002925561,0.0007592406,0.0008362911,0.0003707641,0.00006365735,0.0002662634,4.117835e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000181248,"about_ca_system_score_gemma":0.0003870559,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000002281459,"about_ca_topic_score_gemma":0.000005196598,"domain_scores_codex":[0.9981628,0.00005215485,0.0005465623,0.0003228876,0.0005220913,0.0003934842],"domain_scores_gemma":[0.9983536,0.00003227218,0.0008189267,0.0001248623,0.000574146,0.00009616362],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004175573,0.000009402711,0.004527546,0.00004276329,0.000005251512,0.000001406494,0.0004762762,0.0000297113,0.9887327,0.004497395,0.000003156012,0.001632667],"study_design_scores_gemma":[0.0004347643,0.0009732319,0.003854347,0.0001045557,0.00003061279,0.0001544454,0.0001728155,0.000164449,0.956575,0.03735408,0.00003246472,0.0001491987],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9956294,0.003187322,0.0006398949,0.0002575795,0.0001049214,0.0001027837,0.000001213077,0.00001281194,0.00006405609],"genre_scores_gemma":[0.9933574,0.00008298847,0.006433748,0.00009080508,0.00001845678,0.000002380384,2.421e-7,0.000008151844,0.000005844508],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.03285668,"threshold_uncertainty_score":0.541015,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01768530617942289,"score_gpt":0.2316939323253408,"score_spread":0.214008626145918,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}