{"id":"W2117283955","doi":"10.1149/1.3223985","title":"Role of Heating on Plasma-Activated Silicon Wafers Bonding","year":2009,"lang":"en","type":"article","venue":"Journal of The Electrochemical Society","topic":"3D IC and TSV technologies","field":"Engineering","cited_by":30,"is_retracted":false,"has_abstract":true,"ca_institutions":"McMaster University","funders":"","keywords":"Silicon; Wafer; Materials science; Silicon oxide; Plasma activation; Etching (microfabrication); Surface roughness; Anodic bonding; Composite material; Wafer bonding; Oxide; Reactive-ion etching; Plasma; Layer (electronics); Nanotechnology; Optoelectronics; Metallurgy; Silicon nitride","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00009910778,0.00009626497,0.0001863227,0.00001831605,0.00004204358,0.000007722815,0.0002423953,0.0001205489,0.000004458986],"category_scores_gemma":[0.00008055849,0.00006424909,0.0002634386,0.0001922549,0.00003132592,0.00005540805,0.00001524095,0.000569062,4.958054e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001527024,"about_ca_system_score_gemma":0.00001480606,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":4.890105e-7,"about_ca_topic_score_gemma":4.51399e-8,"domain_scores_codex":[0.9993282,0.000007336982,0.0002416407,0.00005232087,0.0001773856,0.000193101],"domain_scores_gemma":[0.9996586,0.00006040352,0.0001170718,0.0001015698,0.00003276017,0.00002955543],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001455726,0.00001988358,0.00007369088,0.000006057852,0.00005551306,1.623477e-7,0.0001296789,0.0001937679,0.9965789,0.0002213581,0.0005673764,0.002139057],"study_design_scores_gemma":[0.0001972278,0.0001110553,0.0002671115,0.00005842972,0.00001610798,0.00001484185,0.0002058814,0.002307382,0.9940575,0.002470401,0.0002291385,0.00006496721],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.99806,0.0002438508,0.0002471688,0.0004654346,0.00004293085,0.00003464364,3.541349e-7,0.0000639905,0.0008416289],"genre_scores_gemma":[0.9984183,0.0000494386,0.001378551,0.00006463508,0.00006240877,3.470357e-7,2.040258e-7,0.000008685308,0.00001748108],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002521442,"threshold_uncertainty_score":0.2620002,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005075655904516735,"score_gpt":0.2016228554164125,"score_spread":0.1965471995118958,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}