{"id":"W2117385088","doi":"10.1109/mwsym.2010.5516967","title":"A MEMS variable capacitor with piezoresistive position sensing fabricated in a standard 0.35 µm CMOS process","year":2010,"lang":"en","type":"article","venue":"2010 IEEE MTT-S International Microwave Symposium","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":4,"is_retracted":false,"has_abstract":true,"ca_institutions":"COM DEV International; University of Waterloo","funders":"","keywords":"Variable capacitor; Piezoresistive effect; Capacitor; Microelectromechanical systems; CMOS; Electronic engineering; Materials science; Electrical engineering; Variable (mathematics); Optoelectronics; Engineering; Voltage","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002850047,0.0003730459,0.0005367737,0.0005326401,0.0005421186,0.0008290866,0.002128993,0.001120271,0.004194481],"category_scores_gemma":[0.0004449053,0.0003740597,0.0002469033,0.0006806786,0.0003480605,0.000709594,0.0003895359,0.0007376366,0.001097113],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0006205823,"about_ca_system_score_gemma":0.0009421733,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0008972761,"about_ca_topic_score_gemma":0.001373014,"domain_scores_codex":[0.9995077,0.00001852885,0.00002045133,0.0001090016,0.0002966709,0.00004764399],"domain_scores_gemma":[0.9996343,0.00007182098,0.00005809228,0.00004280773,0.0001206309,0.00007241846],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001091843,0.00003582218,0.0002277358,0.0002461744,0.00001836814,0.0003469265,0.00003582368,0.0003584383,0.9774304,0.002171264,0.002116824,0.01690297],"study_design_scores_gemma":[0.00006518202,0.0007050224,0.001869061,0.00002188025,0.0000567023,0.00206982,0.0000248168,0.006111171,0.9557831,0.0004473258,0.03275842,0.00008748602],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.4921674,0.008381926,0.4342119,0.004027063,0.003246888,0.001425172,0.005443224,0.009662073,0.04143434],"genre_scores_gemma":[0.6993852,0.001569584,0.2821705,0.0008017572,0.0003528889,0.0002927654,0.0007268472,0.0001761166,0.01452433],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.004194481,"threshold_uncertainty_score":0.01403189,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006208834230315413,"score_gpt":0.2228340984884203,"score_spread":0.2166252642581049,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}