{"id":"W2117738447","doi":"10.1364/ao.41.002361","title":"Activation of microcomponents with light for micro-electro-mechanical systems and micro-optical-electro-mechanical systems applications","year":2002,"lang":"en","type":"article","venue":"Applied Optics","topic":"Mechanical and Optical Resonators","field":"Physics and Astronomy","cited_by":21,"is_retracted":false,"has_abstract":true,"ca_institutions":"Carleton University","funders":"","keywords":"Surface micromachining; Materials science; Micrometer; Microelectromechanical systems; Optics; Bulk micromachining; Torque; Light beam; Optoelectronics; Fabrication; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001670491,0.0003327134,0.0001854477,0.0001296159,0.0001806685,0.0003502836,0.0002867447,0.0002559925,0.001469079],"category_scores_gemma":[0.0004691761,0.0001355903,0.0001450161,0.0001015042,0.0003519266,0.0003465845,0.000153485,0.0002755065,0.0003601474],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001971833,"about_ca_system_score_gemma":0.0001302147,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001495538,"about_ca_topic_score_gemma":0.000575628,"domain_scores_codex":[0.9999017,0.000007298449,0.000004112992,0.0000185685,0.00005125777,0.00001710127],"domain_scores_gemma":[0.9996886,0.0001732639,0.00006165871,0.00003313833,0.00002745033,0.00001598654],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000317639,0.0000201685,0.0002737529,0.00004712531,0.000002457239,0.00005214555,0.00003787932,0.0003379091,0.9940758,0.0007751351,0.00004197684,0.004303857],"study_design_scores_gemma":[0.00000978009,0.0001509439,0.001298421,0.000003136942,0.000006382772,0.00006552676,0.00002491121,0.003011779,0.9936841,0.0002285912,0.001511857,0.000004648647],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9868187,0.001251875,0.009205826,0.0001367878,0.00003681845,0.0000375189,0.00002963393,0.00008074712,0.00240217],"genre_scores_gemma":[0.9873469,0.0004302917,0.01089649,0.00003003562,0.00001535314,0.00002296246,0.00002460585,0.00001642705,0.00121688],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001469079,"threshold_uncertainty_score":0.004914522,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01111060925490773,"score_gpt":0.2137902651594846,"score_spread":0.2026796559045769,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}